Principle of the planar interferometer and SEM photo of realized systems (etch depth in silica: 100 um, sidewall roughness (Ra) < 10 nm, angle of sidewall 89 °)
Weigel, Christoph;…
Optical lens with refractive index gradient in the y-axis and spherical bending in x-axis for optimised planar integration of a 2D refractive index lens. top: design and stepwise realisisation of…