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Prof. Dr.-Ing. Martin Hoffmann
Address:
Ruhr-University Bochum
Faculty of Electrical Engineering and Informationtechnology
Microsystem Technology
Postbox ID 7
Universitätsstraße 150
D-44801 Bochum
Room:
ID 05/439
Phone:
(+49)(0)234 / 32 - 27700
Fax:
(+49)(0)234 / 32 - 14168
E-Mail:
martin.hoffmann-mst@rub.de
Website:
www.etit.ruhr-uni-bochum.de/lehrstuhl-mikrosystemtechnik/en/
Martin Hoffmann's scientific career started at the University of Dortmund. There he completed his studies and doctorate in the field of high-frequency engineering and habilitated in 2003 in the field of microsystems engineering. He continued as a private lecturer while working as a group leader for innovative projects at HL Planartechnik GmbH in Dortmund and as a project and process manager at Silicon Manufacturing Itzehoe GmbH in the following years. In 2006, he was then appointed university professor at the Technical University of Ilmenau, where he headed the Department of Micromechanical Systems at the Faculty of Mechanical Engineering. As of 01.09.2017, he has now been appointed to the RUB and represents this highly topical field of research, which is characterized by its rapid development, especially in recent years, at our faculty.
2023
Manfred Kohl, Stefan Seelecke and Ulrike Wallrabe (Editors)
Lisa Schmitt, Philip Schmitt, Anna Christina Thewes, Martin Hoffmann et. al. (Authors)
Cooperative Microactuator Systems
Reprint of the Special Issue Cooperative Microactuator Systems that was published in Actuators
ISBN 978-3-0365-8235-1 (PDF),2023
DOI: 10.3390/books978-3-0365-8235-1
Malte J. M. J. Becher, Julia Jagosz, Rahel-Manuela Neubieser, Jan-Lucas Wree, Anjana Devi, Marvin Michel, Claudia Bock, Evgeny L. Gurevich, Andreas Ostendorf:
Ultrashort Pulse Laser Annealing of Amorphous Atomic Layer Deposited MoS2 Films
In: Advanced Engineering Materials, 2023
DOI: 10.1002/adem.202300677
Marcel Alver Burfeindt, Jan Kristof Kother, Lisa Schmitt, Jan Barowski, Ilona Rolfes, Martin Hoffmann:
Approaching Dielectric Silicon Slot Waveguides for THz Frequencies by Simulation From Optical and Electrical Points of View
In: 2023 Sixth International Workshop on Mobile Terahertz Systems (IWMTS)
DOI: 10.1109/IWMTS58186.2023.10207848
Philip Schmitt, Björn Gojdka, Thomas Lisec, Matthias Kroll, Martin Hoffmann:
SOI Integrated Micromagnets for mechanical Magnetic Field Detection
In: : IEEE Sensors Letters ( Early Access ), 2023
DOI: 10.1109/LSENS.2023.3308125
Florian Preischel, David Zanders, Thomas Berning, Aleksander Kostka, Detlef Rogalla, Claudia Bock, Anjana Devi:
Interplay of Precursor and Plasma for The Deposition of HfO2 via PEALD: Film Growth and Dielectric Properties
In: Adv. Mater. Interfaces 2023, 2300244
DOI: 10.1002/admi.202300244
Philip Schmitt, Martin Hoffmann:
Sensors at the Edge: Towards Micromechanical in-Memory Computing
In: 2023 IEEE International Conference on Omni-layer Intelligent Systems (COINS), Berlin, Germany, 2023, pp. 1-5
DOI: 10.1109/COINS57856.2023.10189322
Malte J. Becher, Julia Jagosz, Claudia Bock, Andreas Ostendorf, Evgeny L. Gurevich:
Formation of low and high spatial frequency laser-induced periodic surface structures (LIPSS) in ALD deposited MoS2
In: Front. Nanotechnol. Sec. Nanofabrication Volume 5 - 2023
DOI: 10.3389/fnano.2023.1227025
Philip Schmitt, Martin Hoffmann:
A force-compensated compliant MEMS-amplifier with electrostatic anti-springs
In: Microsystems & Nanoengineering 9, 83 (2023)
DOI: 10.1038/s41378-023-00557-5
Lisa Schmitt, Peter Conrad, Alexander Kopp, Christoph Ament, Martin Hoffmann:
Non-Inchworm Electrostatic Cooperative Micro-Stepper-Actuator Systems with Long Stroke
In: Actuators 2023, 12(4), 150
DOI: 10.3390/act12040150
Martin Hoffmann, Philip Schmitt, Steffen Wittemeier, Falk Schaller, Alexey Shaporin, Chris Stöckel, Volker Geneiß, Roman Forke, Christian Hedayat, Ulrich Hilleringmann, Harald Kuhn, Sven Zimmermann:
Storing MEMS Interfaces Without Electrical Auxiliary Energy for Long-Time Monitoring
In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 522-525
DOI: 10.1109/MEMS49605.2023.10052634
Jan Barowski, Lisa Schmitt, Kristof Kother, Martin Hoffmann:
Design, Simulation, and Characterization of MEMS-Based Slot Waveguides
In: IEEE Transactions on Microwave Theory and Techniques, 2023
DOI: 10.1109/TMTT.2023.3255589
Lisa Schmitt, Xuan Liu, Philip Schmitt, Andreas Czylwik, Martin Hoffmann:
Large Displacement Actuators With Multi-Point Stability for a MEMS-Driven THz Beam Steering Concept
In: Journal of Microelectromechanical Systems, 2023
DOI: 10.1109/JMEMS.2023.3236145
2022
Philip Schmitt, Martin Hoffmann:
A Passive Micromechanical Counting Mechanism
In: 2022 IEEE Sensors, Conference Proceedings
DOI: 10.1109/SENSORS52175.2022.9967002
J. Jagosz, L. Willeke, M. Becher, A. Ostendorf, P. Plate, C. Bock:
Large-area deposition of thin crystalline MoS2 films on 200 mm wafers using plasma-assisted atomic layer deposition
In: GMM-Fachbericht 105: Mikro-Nano-Integration, 21. – 22.11.2022, Aachen; VDE-Verlag, ISBN 978-3-8007-5991-0, pp. 8-11
Marius Hillebrand, Anna Christina Thewes, Martin Hoffmann:
Erhöhung des Technologie-Reifegrades von Silicium-Gras zur Breitbandigen Entspiegelung von Siliciumoberflächen
Increasing the Technological Readiness Level of Silicon Grass for Broadband Anti Reflective Coating of Silicon Surfaces
In: GMM-Fachbericht 105: Mikro-Nano-Integration, 21. – 22.11.2022, Aachen; VDE-Verlag, ISBN 978-3-8007-5991-0, pp. 95-99
Leander Willeke, Julia Jagosz, Nils Gerke, Paul Plate, Martin Hoffmann, Claudia Bock:
Comparative study of wafer-scale Al2O3 layers made by thermal and plasma-enhanced ALD
In: GMM-Fachbericht 105: Mikro-Nano-Integration, 21. – 22.11.2022, Aachen; VDE-Verlag, ISBN 978-3-8007-5991-0, pp. 100-104
Peter Conrad, Leander Willeke, Martin Hoffmann:
Plasmaunterstützte Atomlagenabscheidung (ALD) von Al2O3 für Isolationsschichten in EWOD-Systemen
Plasma enhanced atomic layer deposition (ALD) of Al2O3 for insulating layers in EWOD Systems
In: GMM-Fachbericht 105: Mikro-Nano-Integration, 21. – 22.11.2022, Aachen; VDE-Verlag, ISBN 978-3-8007-5991-0, pp. 118-122
Thomas Berning, Malte Becher, Jan-Lucas Wree, Julia Jagosz, Aleksander Kostka, Andreas Ostendorf, Anjana Devi, Claudia Bock:
Nucleation and growth studies of large-area deposited WS2 on flexible substrates
In: Mater. Res. Express 9 116401 (2022)
DOI: 10.1088/2053-1591/ac9bd0
David Zanders, Jorit Obenlüneschloß, Jan-Lucas Wree, Julia Jagosz, Parmish Kaur, Nils Boysen, Detlef Rogalla, Aleksander Kostka, Claudia Bock, Denis Öhl, Michael Gock, Wolfgang Schuhmann, Anjana Devi:
Unveiling Ruthenium(II) Diazadienyls for Gas Phase Deposition Processes: Low Resistivity Ru Thin Films and Their Performance in the Acidic Oxygen Evolution Reaction
In: Adv. Mater. Interfaces 2022, 2201709
DOI: 10.1002/admi.202201709
Peter Conrad, Andrii Berdnykov, Martin Hoffmann:
Design of a Liquid Dielectrophoresis-driven Platform with Cooperative Actuation
In: GMM-Fachbericht 101: ACTUATOR 2022; International Conference and Exhibition on New Actuator Systems and Applications 29. - 30. Juni 2022; VDE-Verlag, ISBN 978-3-8007-5894-4, pp. 182-185
Anna Christina Thewes, Melvin Jondral, Martin Hoffmann:
Directional Behavior of Periodic Honeycombs: towards Lightweight MEMS on SOI Wafers
In: GMM-Fachbericht 101: ACTUATOR 2022; International Conference and Exhibition on New Actuator Systems and Applications 29. - 30. Juni 2022; VDE-Verlag, ISBN 978-3-8007-5894-4, pp. 244-247
Lisa Schmitt, Philip Schmitt, Martin Hoffmann:
Optimization of Electrostatic Bending-Plate Actuators: Increasing the Displacement and Adjusting the Actuator Stiffness
In: GMM-Fachbericht 101: ACTUATOR 2022; International Conference and Exhibition on New Actuator Systems and Applications 29. - 30. Juni 2022; VDE-Verlag, ISBN 978-3-8007-5894-4, pp. 248-251
Philip Schmitt, Lisa Schmitt, Martin Hoffmann:
How to reduce the Pull-in Displacement of Parallel-Plate Actuators
In: GMM-Fachbericht 101: ACTUATOR 2022; International Conference and Exhibition on New Actuator Systems and Applications 29. - 30. Juni 2022; VDE-Verlag, ISBN 978-3-8007-5894-4, pp. 252-255
Arwed Schuetz, Mario Farny, Michael Olbrich, Martin Hoffmann, Christoph Ament, Tamara Bechtold:
Model Order Reduction of a Nonlinear Electromechanical Beam Actuator by Clustering Nonlinearities
In: GMM-Fachbericht 101: ACTUATOR 2022; International Conference and Exhibition on New Actuator Systems and Applications 29. - 30. Juni 2022; VDE-Verlag, ISBN 978-3-8007-5894-4, pp. 354-357
Mario Farny, Michael Olbrich, Christoph Ament, Martin Hoffmann:
Kick & Catch: Coaction of an electrostatic kick and magnetic catch system for the rotation of a sphere
In: GMM-Fachbericht 101: ACTUATOR 2022; International Conference and Exhibition on New Actuator Systems and Applications 29. - 30. Juni 2022; VDE-Verlag, ISBN 978-3-8007-5894-4, pp. 358-361
Xuan Liu, Lisa Schmitt, Benedikt Sievert, Jonas Lipka, C. Geng, Kevin Kolpatzeck, Daniel Erni, Andreas Rennings, Jan C. Balzer, Martin Hoffmann, Andreas Czylwik:
Terahertz Beam Steering Using a MEMS-based Reflectarray Configured by a Genetic Algorithm
In: IEEEAccess, Vol. 10, pp. 84458-84472, 2022
DOI: 10.1109/ACCESS.2022.3197202
L. Schmitt, J. Barowski, M. Hoffmann:
THz Phase Shifter based on MEMS-actuated Slot Waveguides
In: 2022 Fifth International Workshop on Mobile Terahertz Systems (IWMTS), 2022, pp. 1-4
DOI: 10.1109/IWMTS54901.2022.9832456
Francesca Schenkel, Irwin Barengolts, Lisa Schmitt, Ilona Rolfes, Martin Hoffmann, Jan Barowski:
Silicon based Metamaterials for Dielectric Waveguides in the THz Range
In: 21st Mediterranean Microwave Symposium (MMS) 2022, May 9-13 2022.
Petr Kadera, Jesús Sánchez-Pastor, Lisa Schmitt, Martin Schüßler, Rolf Jakoby, Martin Hoffmann, Alejandro Jiménez-Sáez, Jaroslav Lacik:
Sub-THz Luneburg lens enabled wide-angle frequency-coded identification tag for passive indoor self-localization
In: International Journal of Microwave and Wireless Technologies , First View , pp. 1 - 15 (2022)
DOI: 10.1017/S175907872200054X
Philip Schmitt, Martin Hoffmann:
A passive acceleration sensor with mechanical 6 bit memory and mechanical analog-to-digital converter
In: Micro and Nano Engineering, May 2022, 100142
DOI: 10.1016/j.mne.2022.100142
Michael Olbrich, Mario Farny, Martin Hoffmann, Christoph Ament:
Modeling and Control Design of a Contact-Based, Electrostatically Actuated Rotating Sphere
In: Actuators 2022, 11, 90
DOI: 10.3390/act11030090
R.-M. Neubieser, J.-L. Wree, J. Jagosz, M. Becher, A. Ostendorf, A. Devi, C. Bock, M. Michel, A. Grabmaier:
Low-Temperature ALD Process Development of 200 mm wafer-scale MoS2 for Gas Sensing Application
In: Micro and Nano Engineering, Vol. 15, 100126 (2022)
DOI: 10.1016/j.mne.2022.100126
Philip Schmitt, Martin Hoffmann:
Tracing the Force-Displacement Characteristics of Non-Linear Microsystems by In-Situ Characterization
In: 2022IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 2022, pp. 691-694
DOI: https://doi.org/10.1109/MEMS51670.2022.9699564
2021
Christoph Weigel, Ulrike Brokmann, Meike Hofmann, Arne Behrens, Edda Rädlein, Martin Hoffmann, Steffen Strehle, Stefan Sinzinger:
Perspectives of reactive ion etching of silicate glasses for optical microsystems
In: J. of Optical Microsystems, 1(4), 040901 (2021)
DOI: https://doi.org/10.1117/1.JOM.1.4.040901
Anna Thewes, Philip Schmitt, Philipp Löhler, Martin Hoffmann:
Mikromechanischer Konstant-Kraft Taster zur Stimulation und Analyse von Zellen
In: MikroSystemTechnik Kongress 2021 (8. – 10. November 2021), Stuttgart-Ludwigsburg; VDE-Verlag, ISBN 978-3-8007-5656-8
Lisa Schmitt, Philip Schmitt, Martin Hoffmann:
Mechanischer 3-Bit Digital-Analog-Wandler (DAC) mit großem Stellweg
In: MikroSystemTechnik Kongress 2021 (8. – 10. November 2021), Stuttgart-Ludwigsburg; VDE-Verlag, ISBN 978-3-8007-5656-8
Philip Schmitt, Martin Hoffmann:
Energieautarker Beschleunigungssensor mit Maximalwertspeicher
In: MikroSystemTechnik Kongress 2021 (8. – 10. November 2021), Stuttgart-Ludwigsburg; VDE-Verlag, ISBN 978-3-8007-5656-8
Mario Farny, Martin Hoffmann:
Kick & Catch: elektrostatisches Rotieren einer Kugel
In: MikroSystemTechnik Kongress 2021 (8. – 10. November 2021), Stuttgart-Ludwigsburg; VDE-Verlag, ISBN 978-3-8007-5656-8
M. Hoffmann, P. Schmitt, S. Zimmermann, C. Stöckel, R. Forke, V. Geneiß, S. Wittemeier, C. Hedayat, U. Hilleringmann, H. Kuhn:
Speichernde Sensorkonzepte mit in-memory-Computing, ganz ohne elektrische Hilfsenergie
In: MikroSystemTechnik Kongress 2021 (8. – 10. November 2021), Stuttgart-Ludwigsburg; VDE-Verlag, ISBN 978-3-8007-5656-8
M. Hoffmann, P. Awakowicz, A. Devi, J. Schulze, B. Freyer, F.P. Witek, C. Bock
Ein Prozess-Integrierendes Clustertool für 2D-Materialsysteme: vom Einzelprozess zur Integration auf Waferlevel
A process-integrating cluster tool for 2D materials: from single process to wafer level integration
In: MikroSystemTechnik Kongress 2021 (8. – 10. November 2021), Stuttgart-Ludwigsburg; VDE-Verlag, ISBN 978-3-8007-5656-8
M. Becher, J.-L. Wree, T. Berning, R.-M. Neubieser, A. Ostendorf, A. Devi, C. Bock, M. Michel:
Raman spectroscopy as an effective tool for characterizing large-area 2D TMDs deposited from the gas phase
In: MikroSystemTechnik Kongress 2021 (8. – 10. November 2021), Stuttgart-Ludwigsburg; VDE-Verlag, ISBN 978-3-8007-5656-8
T. Berning, S. M. J. Beer, N. Boysen, A. Devi, C. Bock:
Electrical properties of functional Y2O3 films applied to thin film transistors
In: MikroSystemTechnik Kongress 2021 (8. – 10. November 2021), Stuttgart-Ludwigsburg; VDE-Verlag, ISBN 978-3-8007-5656-8
Hannes Mehner, Philip Schmitt, Martin Hoffmann:
Mikrosysteme zur Messung von Haftreib- und Gleitreibfaktoren an DRIE geätzten Seitenwänden bei hohen Normalkräften im mN-Bereich
In: MikroSystemTechnik Kongress 2021 (8. – 10. November 2021), Stuttgart-Ludwigsburg; VDE-Verlag, ISBN 978-3-8007-5656-8
Christoph Weigel, Hai Binh Phi, Martin Hoffmann, Stefan Sinzinger, Steffen Strehl:
Vergleich der Plasmastrukturierbarkeit von Materialien mit sehr geringer thermischer Ausdehnung
In: MikroSystemTechnik Kongress 2021 (8. – 10. November 2021), Stuttgart-Ludwigsburg; VDE-Verlag, ISBN 978-3-8007-5656-8
Xuan Liu, Lisa Schmitt, Kevin Kolpatzeck, Martin Hoffmann, Jan C. Balzer and Andreas Czylwik:
Configuration of a MEMS-based Terahertz Reflectarray Using a Genetic Algorithm
In: 2021 46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2021, pp. 1-2
DOI: https://ieeexplore.ieee.org/document/9567102
Lisa Schmitt and Martin Hoffmann:
Large Stepwise Discrete Microsystem Displacements Based on Electrostatic Bending Plate Actuation
In: Actuators 2021, 10(10), 272
DOI: https://www.mdpi.com/2076-0825/10/10/272
Shraddha Supreeti, Ralf Schienbein, Patrick Feßer, Florian Fern, Martin Hoffmann and Stefan Sinzinger:
Development and Implementation of a Rotating Nanoimprint Lithography Tool for Orthogonal Imprinting on Edges of Curved Surfaces
In: Nanomanufacturing and Metrology (2021) 4:175–180
DOI: https://doi.org/10.1007/s41871-021-00114-6
Sebastian M.J. Beer, Nils Boysen, Arbresha Muriqi, David Zanders, Thomas Berning, Detlef Rogalla, Claudia Bock, Michael Nolan and Anjana Devi:
A study on the influence of ligand variation on formamidinate complexes of yttrium: new precursors for atomic layer deposition of yttrium oxide
In: Dalton Transactions, 2021, Advance Article.
DOI: 10.1039/D1DT01634B
Anna Christina Thewes, Philip Schmitt, Philipp Löhler and Martin Hoffmann:
Design and Characterization of an Electrostatic Constant-Force Actuator Based on a Non-Linear Spring System
In: Actuators 2021, 10(8), 192.
DOI: 10.3390/act10080192
Schmitt, Lisa; Schmitt, Philip; Hoffmann, Martin:
3-Bit Digital-to-Analog Converter with Mechanical Amplifier for Binary Encoded Large Displacements
In: Actuators 2021, 10, 182.
DOI: 10.3390/act10080182
Zanders,David; Liu, Ji; Obenlüneschloß, Jorit; Bock, Claudia; Rogalla, Detlef; Mai, Lukas; Nolan, Michael; Barry, Seán T.; Devi, Anjana:
Cobalt Metal ALD: Understanding the Mechanism and Role of Zinc Alkyl Precursors as Reductants for Low-Resistivity Co
Thin Films
In: Chem. Mater. 2021
DOI: 10.1021/acs.chemmater.1c00877
Lu, Pai; Chen, Xuyuan; Ohlckers, Per; Halvorsen, Einar; Hoffmann, Martin; Müller, Lutz:
DRIE Si Nanowire Arrays Supported Nano-Carbon Film for Deriving High Specific Energy Supercapacitors On-Chip
In: J. Phys.: Conf. Ser. 1837 012005
DOI: 10.1088/1742-6596/1837/1/012005
Schmitt, Philip; Schmitt, Lisa; Tsivin, Nick; Hoffmann, Martin:
Highly Selective Guiding Springs for Large Displacements in Surface MEMS
In: Journal of Microelectromechanical Systems, May 2021
DOI: 10.1109/JMEMS.2021.3074822
Boysen, Nils; Zanders, David; Berning, Thomas; Beer, Sebastian M. J.; Rogalla, Detlef; Bock, Claudia; Devi, Anjana:
Atomic layer deposition of dielectric Y2O3 thin films from a homoleptic yttrium formamidinate precursor and water
In: Royal Society of Chemistry Adv., 2021, 11, 2565–2574
DOI: 10.1039/d0ra09876k
Weigel, Christoph; Phi, Hai Binh; Denissel, Felix Arthur; Hoffmann, Martin; Sinzinger, Stefan; Strehle, Steffen:
Highly Anisotropic Fluorine-Based Plasma Etching of Ultra-Low Expansion Glass
In: Advanced Engineering Materials 2021, 2001336
DOI: 10.1002/adem.202001336
Schmitt, Lisa; Schmitt, Philip; Barowski, Jan; Hoffmann, Martin:
Stepwise Electrostatic Actuator System for THz Reflect Arrays
In: GMM-Fachbericht 98: ACTUATOR 2021;
International Conference and Exhibition on New Actuator Systems and Applications 17. - 19. Februar 2021
Conrad, Peter; Hoffmann, Martin:
A Consistent View on Cooperative Multistage Electrostatic Actuation
In: GMM-Fachbericht 98: ACTUATOR 2021;
International Conference and Exhibition on New Actuator Systems and Applications 17. - 19. Februar 2021
Kadera, Petr; Jiménez-Sáez, Alejandro; Schmitt, Lisa; Schüßler, Martin; Hoffmann, Martin; Lacik, Jaroslav; Jakoby, Rolf:
Frequency Coded Retroreflective Landmark for 230 GHz Indoor Self-Localization System
In: 15th European Conference on Antennas and Propagation (EuCAP), 22-26 March 2021
DOI: 10.23919/EuCAP51087.2021.9410973
Schmitt, L.; Liu, X.; Czylwik, A.; Hoffmann, M.:
Design and Fabrication of MEMS Reflectors for THz Reflect-Arrays
In: 2021 Fourth International Workshop on Mobile Terahertz Systems (IWMTS), 2021, pp. 1-5
DOI: 10.1109/IWMTS51331.2021.9486804
2020
Jiménez-Sáez, A.; Alhaj-Abbas, A.; Schüßler, M.; Abuelhaija, A.; El-Absi, M.; Sakaki, M.; Samfaß, L.; Benson, N.; Hoffmann, M.;
Jakoby, R.; Kaiser, T.; Solbach, K.:
Frequency-Coded mm-Wave Tags for Self-Localization System Using Dielectric Resonators
In: J. Infrared Millim. Terahertz Waves, Vol. 41, 908–925(2020)
DOI: 10.1007/s10762-020-00707-0
Liu, Xuan; Samfaß, Lisa; Kolpatzeck, Kevin; Häring, Lars; Balzer, Jan C.; Hoffmann, Martin; Czylwik, Andreas:
Terahertz Beam Steering Concept Based on a MEMS-Reconfigurable Reflection Grating
In: Sensors 2020, 20(10), 2874
DOI: 10.3390/s20102874
Mai, Lukas; Mitschker, Felix; Bock, Claudia; Niesen, Alessia; Ciftyurek, Engin; Rogalla, Detlef; Mickler, Johannes;
Erig, Matthias; Li, Zheshen; Awakowicz, Peter; Schierbaum, Klaus; Devi, Anjana:
From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for
Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
In: Small 2020, 1907506
DOI: 10.1002/smll.201907506
Schmitt, Philip; Hoffmann, Martin:
Engineering a Compliant Mechanical Amplifier for MEMS Sensor Applications
In: Journal of Microelectromechanical Systems PP(99):1-14, 2020
DOI: 10.1109/JMEMS.2020.2965260
Schricker, K.; Samfaß, L.; Grätzel, M.; Ecke, G.; Bergmann, J.P.:
Bonding mechanisms in laser-assisted joining of metal-polymer composites
In: Journal of Advanced Joining Processes, 1 (2020) 100008
DOI: 10.1016/j.jajp.2020.100008
Samfaß, Lisa; Baak, Nikolas; Meya, Rickmer; Hering, Oliver; Tekkaya, A. Erman; Walther, Frank:
Micro-magnetic damage characterization of bent and cold forged parts
In: Production Engineering 14, 77–85(2020)
DOI: 10.1007/s11740-019-00934-y
Biermann, S.; Magi, A.; Sachse, P.; Hoffmann, M.; Wedrich, K.; Müller, L.; Koppert, R.; Ortlepp, T.; Baldauf, J.:
Advanced broadband MEMS infrared emitter based on high-temperature-resistant nanostructured surfaces and
packaging solutions for harsh environments
In: Proceedings Volume 11279; Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIII; 1127908 (2020)
DOI: 10.1117/12.2545119
Schmitt, Lisa; Schmitt, Philip; Liu, Xuan; Czylwik, Andreas; Hoffmann, Martin:
Micromechanical Reflect-Array for THz Radar Beam Steering based on a Mechanical D/A Converter and a Mechanical Amplifier
In: 2020 Third International Workshop on Mobile Terahertz Systems (IWMTS)
DOI: 10.1109/IWMTS49292.2020.9166235
Schmitt, Philip; Hoffmann, Martin:
Direct Binary Encoding of Displacements on the Nano-Scale
In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
DOI: 10.1109/MEMS46641.2020.9056116
Hoffmann, Martin:
Preface / Vorwort
In: GMM-Fachbericht 97: Mikro-Nano-Integration, 8. GMM-Workshop 15. – 17.09.2020 Online
Thewes,Anna; Breisch, Marina; Sengstock, Christina; Hoffmann, Martin:
Vitality investigation of adherent stem cells on nano-structured silicon surface
Vitalitätsuntersuchung adhärenter Stammzellen auf nanostrukturierter Silicium-Oberfläche
In: GMM-Fachbericht 97: Mikro-Nano-Integration, 8. GMM-Workshop 15. – 17.09.2020 Online
Berning,T.; Wree, J.-L.; Devi, A.; Bock,C.:
Strukturierung von großflächig abgeschiedenen Übergangsmetall-Dichalkogenid Filmen für den Einsatz in der 2D-Elektronik
In: GMM-Fachbericht 97: Mikro-Nano-Integration, 8. GMM-Workshop 15. – 17.09.2020 Online
2019
Zanders, David; Ciftyurek, Engin; Subasi, Ersoy; Huster, Niklas; Bock, Claudia; Kostka, Aleksander; Rogalla, Detlef;
Schierbaum, Klaus; Devi, Anjana:
PEALD of HfO2 Thin Films: Precursor Tuning and a New Near- Ambient-Pressure XPS Approach to in Situ Examination
of Thin-Film Surfaces Exposed to Reactive Gases
In: ACS Appl. Mater. Interfaces 2019, 11, 28407-28422
DOI: 10.1021/acsami.9b07090
Jaehnike, Felix; Pham, Duy Vu; Bock, Claudia; Kunze, Ulrich:
Role of gallium and yttrium dopants on the stability and performance of solution processed indium oxide thin-film transistors
In: J. Mater. Chem. C, 2019, 7, 7627-7635
DOI: 10.1039/C8TC06270F
Mai, Lukas; Zanders, David; Subasi, Ersoy; Ciftyurek, Engin; Hoppe, Christian; Rogalla, Detlef; Gilbert, Wolfram;
de los Arcos, Teresa; Schierbaum, Klaus; Grundmeier, Guido; Bock, Claudia; Devi, Anjana:
Low Temperature Plasma-Enhanced Atomic Layer Deposition of Tin(IV) Oxid from a Functionalized Alkyl Precursor:
Fabrication and Evaluation fo SnO2-Based Thin-Film Transistor Devices
In: ACS Appl. Mater. Interfaces 2019, 11, 3169-3180
DOI: 10.1021/acsami.8b16443
Kasischke, Maren; Subasi, Ersoy; Bock, Claudia; Pham, Duy-Vu, Gurevich, Evgeny L.; Kunze, Ulrich; Ostendorf, Andreas:
Femtosecond laser patterning of grapheme electrodes for thin-film transistors
In: Applied Surface Science 478 (2019) 299-303
DOI: 10.1016/j.apsusc.2019.01.198
Fischer, Michael; Gropp, Sebastian; Stegner, Johannes; Frank, Astrid; Hoffmann, Martin; Mueller, Jens:
Silicon-Ceramic Composite Substrate
In: IEEE Microwave Magazine ( Volume: 20, Issue: 10, Oct. 2019)
DOI: 10.1109/MMM.2019.2928675
Wree, Jan-Lucas; Berning, Thomas; Bock, Claudia; Devi; Anjana:
Chemische Gasphasenabscheidung von 2D Übergangsmetall Dichalkogeniden für mikroelektronische Anwendungen
In: MikroSystemTechnik Kongress 2019, Berlin, 28. - 30. Oktober 2019
Schmitt, Philip; Tsivin, Nick; Hoffmann, Martin:
Mikromechanischer Analog-Digital-Wandler zur Digitalisierung mechanischer Verschiebungen
In: MikroSystemTechnik Kongress 2019, Berlin, 28. - 30. Oktober 2019
Bock, Claudia; Subasi, Ersoy; Berning, Thomas; Pham, Duy Vu; Kunze, Ulrich:
Graphen-Elektroden für den Einsatz in Metalloxid-ünnfilmtransistoren
In: MikroSystemTechnik Kongress 2019, Berlin, 28. - 30. Oktober 2019
Weigel, Christoph; Sinzinger, Stefan; Strehle, Steffen; Hoffmann, Martin:
Trockenchemisches Freistellen von Mikrostrukturen in der Glaskeramik Zerodur
In: MikroSystemTechnik Kongress 2019, Berlin, 28. - 30. Oktober 2019
Petrich, Rebecca; Bartsch, Heike; Tonisch, Katja; Jaekel, Konrad; Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel;
Delan, Annekatrin; Krischok, Stefan; Strehle, Steffen; Hoffmann, Martin; Müller, Jens:
Untersuchung von ScAlN für piezoelektrische und ferroelektrische Anwendungen
In: MikroSystemTechnik Kongress 2019, Berlin, 28. - 30. Oktober 2019
Thewes, Anna; Weigel, Christoph; Barowski, Jan; Hoffmann, Martin:
Optimierung eines Biegeplattenwellensensors für hohe Eindringtiefe und Sensitivität
In: MikroSystemTechnik Kongress 2019, Berlin, 28. - 30. Oktober 2019
Wedrich, Karin; Müller, Lutz; Magi, Andre; Biermann, Steffen; Koppert, Ralf; Hoffmann, Martin:
Hochtemperatur-feste nanostrukturierte IR-Emitter
In: MikroSystemTechnik Kongress 2019, Berlin, 28. - 30. Oktober 2019
Weigel, Christoph; Hanitsch, Stefan; Dressler, Lothar; Hoffmann, Martin:
Mikrofluidische In-plane-Kontaktierungskonzepte
In: MikroSystemTechnik Kongress 2019, Berlin, 28. - 30. Oktober 2019
Stehr, Uwe; Stegner, Johannes; Fischer, Michael; Gropp, Sebastian; Müller, Jens; Hoffmann, Martin; Hein, Matthias:
Ganzheitliche Entwurfsmethodik für kompakte HF-MEMS-Oszillatoren auf einem SiCer-Verbundsubstrat
In: MikroSystemTechnik Kongress 2019, Berlin, 28. - 30. Oktober 2019
Schmitt, Philip; Hoffmann, Martin:
How to Defeat Electric Noise in Measurement Acquisition Using a Micromechanical Analog-to-Digital Converter
In: Transducers 2019 – EUROSENSORS XXXIII – Berlin, 23-27 June 2019
DOI: 10.1109/TRANSDUCERS.2019.8808539
2018
Schmitt, Philip; Mehner, Hannes; Hoffmann, Martin:
A Micromechanical Binary Counter with MEMS-Based Digital-to-Analog Converter
In: Proceedings 2018, 2, 807
DOI: 10.3390/proceedings2130807
Weigel, Christoph; Sinzinger, Stefan; Hoffmann, Martin:
Deep etched and released microstructures in Zerodur in a fluorine-based plasma
In: Microelectronic Engineerung, Volume 198, 15 October 2018, pp. 78-84
DOI: 10.1016/j.mee.2018.07.004
Si, Shuhao; Hoffmann, Martin:
Image inverting, topography and feature size manipulation using organic/inorganic bi-layer lift-off for nanoimprint template
In: Microelectronic Engineering, Volume 197, S. 39-44, October 2018
DOI: 10.1016/j.mee.2018.05.005
Cwik, Stefan; Mitoraj, Dariusz; Mendoza Reyes, Oliver; Rogalla, Detlef; Peeters, Daniel; Kim, Jiyeon; Schütz, Hanno Maria;
Bock, Claudia; Beranek, Radim; Devi, Anjana:
Direct growth of MoS2 and WS2 layers by Metal Organic Chemical Vapor Deposition
In: Adv. Mater. Interfaces 2018
DOI: 10.1002/admi.201800140
Weigel, Christoph; Grewe, Adrian; Sinzinger, Stefan; Hoffmann, Martin:
A microoptical sidestream cuvette based on fast passive gas exchange for capnography
In: Sensors and Actuators A: Physical, Volume 276, 15. Juni 2018, S. 68-75
DOI: 10.1016/j.sna.2018.04.022
Weigel, Christoph; Schulze, Marcel; Gargouri, Hassan; Hoffmann, Martin:
Deep etching of Zerodur glass ceramics in a fluorine-based plasma
In: Microelectronic Engineering, Volume 185-186, 05. Januar 2018, S. 1-8
DOI: 10.1016/j.mee.2017.10.013
Mai, Lukas; Boysen, Nils; Subasi, Ersoy; de los Arcos, Teresa; Rogalla, Detlef; Grundmeier, Guido; Bock, Claudia;
Lu, Hong-Liang; Devi, Anjana:
Water assisted atomic layer deposition of yttrium oxide using tris(N,N'-diisopropyl-2-dimethylamido-guanidinato)
yttrium(III): process development, film characterization and functional properties
In: RSC Advances, 2018, 8, 4987-4994
DOI: 10.1039/C7RA13417G
Yuan, Qian; Döll, Joachim; Romanus, Henry; Wang, Hongmei; Bartsch, Heike; Albrecht, Arne; Hoffmann, Martin; Schaaf, Peter;
Wang, Dong:
Surface-Nanostructured Al-AlN Composite Thin Films with Excellent Broad-Band Antireflection Properties Fabricated by
Limited Reactive Sputtering
In: ACS Appl. Nano Mater. 2018, 1, 1124-1130
DOI: 10.1021/acsanm.7b00302
Günther, Sarah; Si, Shuhao; D’heer, Herbert; Van Thourhout, Dries; Hoffman, Martin:
FDTS as Dewetting Coating for an Electrowetting Controlled Silicon Photonic Switch
In: IEEE PHOTONICS TECHNOLOGY LETTERS, VOL. 30, NO. 23, DECEMBER 1, 2018
DOI: 10.1109/LPT.2018.2874351
Subasi, Ersoy; Boysen, Nils; Mai, Lukas; Pham, Duy-Vu; Bock, Claudia; Devi, Anjana, Kunze, Ulrich:
Y2O3 sol-gel passivation layer for solution-processed metal-oxide thin-film transistors
In: 7. GMM-Workshop Mikro-Nano-Integration – MNI 2018, Dortmund, 22.-23. Oktober 2018
Bock, Claudia; Subasi, Ersoy; Kasischke, Maren; Pham, Duy-Vu; Xiao, Shizhou; Du, Keming; Ostendorf, Andreas; Kunze, Ulrich:
Effective conversion processes of metal-oxide precursors for the reduction of the conversion temperature in solution
processed metal-oxide thin-film transistors
In: 7. GMM-Workshop Mikro-Nano-Integration – MNI 2018, Dortmund, 22.-23. Oktober 2018
Günther, Sarah; Gropp, Sebastian; Hoffmann, Martin; D’heer, Herbert; van Thourhout, Dries; Neft, Anna; Bartels, Frank;
Gradkowski, Kamil; Carroll, Lee; O’Brien, Peter; Lerma-arce, Cristina; Watté , Jan:
Electrowetting Controlled Non-Volatile Integrated Optical Switch
In: 44th European Conference on Optical Communication 2018, Rom, 23.-27. September 2018
DOI: 10.1109/ecoc.2018.8535585
Hanitsch, Stefan; Pliquett, Uwe; Hoffmann, Martin; Sinzinger, Stefan
MEMS Needle Electrode for Impedance Spectroscopy on Cell Spheroids
BMT 2018, Aachen, 26.–28.09.2018
In: Biomed. Eng.-Biomed. Tech. 2018; 63(s1): S.333
DOI: 10.1515/bmt-2018-6051
Hanitsch, Stefan; Dressler, Lothar; Hoffmann, Martin
Automatisierte Testung Stimuli-sensitiver Funktionsmaterialien
11. Thüringer Biomaterial Kolloquium, Zeulenroda, 13.-15.03.2018
2017
Pai Lu, Lutz Müller, Martin Hoffmann, Xuyuan Chena:
Taper silicon nano-scaffold regulated compact integration of 1D nanocarbons for improved on-chip supercapacitor
In: Nano Energy, Vol. 41, November 2017, Pages 618-625
DOI: https://doi.org/10.1016/j.nanoen.2017.10.019
Bohm, Sebastian; Goj, Boris; Dittrich, Lars; Dressler, Lothar; Hoffmann, Martin:
Material dependence of the contact behaviour of oscillating microprobes - modelling and experimental evidence
In: Journal of Micro- and Nanomanufacturing 5(2), 2. März 2017
DOI: 10.1115/1.4035619
Leopold, Steffen; Pätz, Daniel; Sinzinger, Stefan; Hoffmann, Martin:
Stress-modulated tilt actuator for tunable optical prisms
In: Sensors and Actuators A: Physical Volume 266, 15. Oktober 2017, S. 328 - 337
DOI: 10.1016/j.sna.2017.09.021
Si, Shuhao; Dittrich, Lars; Hoffmann, Martin:
The NanoTuFe - Fabrication of large area periodic nanopatterns with tunable feature sizes at low cost
In: Microelectronic Engineering, Volume 180, 5. August 2017, pp. 71-80
DOI: 10.1016/j.mee.2017.06.002
Si, Shuhao; Hoffmann, Martin:
Consecutive imprinting performance of large area UV nanoimprint lithography using bi-layer soft stamps in ambient
atmosphere
In: Microelectronic Engineering, Volume 176, 25. Mai 2017, pp. 62-70
DOI: 10.1016/j.mee.2017.01.032
Si, Shuhao; Dittrich, Lars; Hoffmann, Martin:
Low-cost fabrication of nanoimprint templates with tunable feature sizes at a constant pitch
In: Microelectronic Engineering, Volume 170, 25. Februar 2017, pp. 34-38
DOI: 10.1016/j.mee.2016.12.023
Weigel, Christoph; Markweg, Eric; Müller, Lutz; Schulze, Marcel; Gargouri, Hassan; Hoffmann, Martin:
A monolithic micro-optical interferometer deep etched into fused silica
In: Microelectronic Engineering, Volume 174 (2017), 25. April 2017, pp. 40-45
DOI: 10.1016/j.mee.2017.01.002
Weigel, Christoph; Schulze, Marcel; Gargouri, Hassan; Hoffmann, Martin:
Deep etching of Zerodur glass ceramics in a fluorine-based plasma
In: Microelectronic Engineering, Oktober 2017
DOI: 10.1016/j.mee.2017.10.013
J. F. von Pock, D. Salloch, U. Wieser, T. Hackbarth, and U. Kunze:
Identification and separation of rectifier mechanisms in Si/SiGe ballistic cross junctions
In: J. Appl. Phys. 121, 014304 (2017).
DOI: 10.1063/1.4973279
J. von Pock, U. Wieser, and U. Kunze:
Input-current addition in closely positioned dual-stage ballistic rectifiers
In: Phys. Rev. Applied 7, 044023 (2017).
DOI: 10.1103/PhysRevApplied.7.044023
Si, Shuhao; Fesser, Patrick; Grewe, Adrian; Hoffmann, Martin; Sinzinger, Stefan:
Multi-Level Diffractive Lenses Patterning on Convex Lens by Soft UV Nanoimprint Lithography
In: The 16th International Conference on Nanoimprint and Nanoprint Technology (NNT 2017),
Gyeongnam, Korea, 8.-10. November 2017
Si, Shuhao; Dittrich, Lars; Hoffmann, Martin:
Image Inverting and Manipulation using Bi-layer Lift-off for NIL Template
In: The 16th International Conference on Nanoimprint and Nanoprint Technology (NNT 2017),
Gyeongnam, Korea, 8.-10. November 2017
Hanitsch, Stefan; Hoffmann, Martin
Active pore for sensor protection: A PNIPAM based micro valve in LTCC
IEEE Sensors Conference, Glasgow, UK, 29.10.-01.11. 2017
DOI: 10.1109/ICSENS.2017.8234338
Schmitt, Philip; Wedrich, Karin; Müller, Lutz; Mehner, Hannes; Hoffmann, Martin:
Design, fabrication and characterization of a microfluidic time-temperature indicato
In: Proceedings of the 28th Micromechanics and Microsystems Europe workshop, Uppsala, Schweden, 23.-25. August 2017
Si, Shuhao; Dittrich, Lars; Hoffmann, Martin:
Low-cost fabrication of large area periodic nanopatterns with tunable feature sizes using soft UV-Nanoimprint
at ambient atmosphere
In: 61st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2017),
Orlando, USA, 30. Mai-2. Juni 2017
Si, Shuhao; Dittrich, Lars; Hoffmann, Martin:
A fabrication process for nanopatterns shrinkage with variable sizes for large area
In: 2nd International Conference on Nanomaterials, Nanodevices, Fabrication and Characterization (ICNNFC'17),
Barcelona, Spanien, 4.-6. April 2017
Wedrich, Karin; Mehner, Hannes; Hoffmann, Martin:
Numerical model of a passive microsystem detecting and saving independent acceleration shocks
In: Proceedings of the 28th Micromechanics and Microsystems Europe workshop, Uppsala, Schweden, 23.-25. August 2017
2016
Bunge, Frank; Leopold, Steffen; Bohm, Sebastian; Hoffmann, Martin:
Scanning micromirror for large, quasi-static 2D-deflections based on electrostatic driven rotation of a hemisphere
In: Sensors and Actuators A: Physical 243 (2016), pp. 159-166
DOI: 10.1016/j.sna.2016.02.031
Degenhardt, Sarah; Cheriguen, Yahia; Geiling, Thomas; Hoffmann, Martin:
Micro-Venturi injector: design, experimental and simulative examination
In: Journal of Physics: Conference Series, Volume 757, Number 1
DOI: 10.1088/1742-6596/757/1/012027
Lu, Pai; Ohlckers, Per; Müller, Lutz; Leopold, Steffen; Hoffmann, Martin; Grigoras, Kestutis; Ahopelto, Jouni; Prunnila, Mika;
Chen, Xuyuan:
Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors
In: Electrochemistry Communications, Volume 70, September 2016, pp. 51-55
DOI: 10.1016/j.elecom.2016.07.002
Mehner, Hannes; Müller, Lutz; Biermann, Steffen; Hänschke, Frank; Hoffmann, Martin:
Process flow to integrate nanostructures on silicon grass in surface micromachined systems
In: Journal of Physics: Conference Series, Volume 757, Number 1
DOI: 10.1088/1742-6596/757/1/012022
Müller, Lutz; Mehner, Hannes; Hoffmann, Martin:
MEMS gas ionization sensor with palladium nanostructures for use at ambient pressure
In: Journal of Physics: Conference Series, Volume 757, Number 1
DOI: 10.1088/1742-6596/757/1/012023
J. F. von Pock, D. Salloch, G. Qiao, U. Wieser, T. Hackbarth, and U. Kunze:
Quantization and anomalous structures in the conductance of Si/SiGe quantum point contacts
In: J. Appl. Phys. 119, 134306 (2016).
DOI: 10.1063/1.4945116
Degenhardt, Sarah; Cheriguen, Yahia; Geiling, Thomas; Hoffmann, Martin:
Micro-Venturi injector: design, experimental and simulative examination
In: Proceedings of the 27th Micromechanics Europe Workshop, 28.-30. August 2016, Cork, Irland
Fischer, Michael; Welker, Tilo; Leistritz, B.; Gropp, Sebastian; Schäffel, C.; Hoffmann, Martin; Müller, Jens:
Investigations of metal systems in a silicon ceramic composite substrate for electrical and thermal contacts
as well as associated mounting aspects
In: IMAPS/ACerS 12th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems
Technologies (CICMT), Denver, USA, 19.-21. April 2016
Goj, Boris; Dressler, Lothar; Dittrich, Lars; Hoffmann, Martin:
Resonant three-dimensional electrostatic actuator in silicon technology
In: Proceedings 15th International Conference on New Actuators Bremen: Messe Bremen, 2016
ISBN 978-3-933339-26-3
Goj, Boris; Bohm, Sebastian; Dittrich, Lars; Dressler, Lothar; Hoffmann, Martin:
Non-destructive material characterisation by oscillating microprobes
In: 42nd Micro and Nano Engineering (MNE), 19.-23. September 2016, Wien, Österreich
Gropp, Sebastian; Fischer, Michael; Dittrich, Lars; Capraro, Beate; Müller, Jens; Hoffmann, Martin:
Wetting behaviour of LTCC and glasses on nanostructured silicon surfaces during sintering
In: The 3rd International Conference & 5th International MacroNano-Colloquium on the Challenges and Perspectives
of Functional Nanostructures (CPFN), Ilmenau, Deutschland, 20.-22. Juni 2016
Gropp, Sebastian; Fischer, Michael; Frank, A.; Schäffel, C.; Müller, Jens; Hoffmann, Martin:
Fabrication of an RF-MEMS-switch on a hybrid Si-ceramic substrate
In: IMAPS/ACerS 12th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems
Technologies (CICMT), Denver, USA, 19.-21. April 2016
Hoffmann, Martin; Mehner, Hannes:
Energieautarke RFID-Sensoren – Messen & Speichern ohne elektrische Hilfsenergie
In: 8. GMM-Workshop Energieautarke Sensorik - EAS 2016, Renningen, 25.-26. Februar 2016
Hoffmann, Martin; Wedrich, Karin; Schmitt, Philipp; Mehner, Hannes; Jurisch, Reinhard:
Non-electrical sensing and storing: an alternative to electrical energy harvesting
In: Proceedings of the Eurosensors 2016, 04.-07. September 2016, Budapest, Ungarn
Krömker, Heidi; Hoffmann, Martin; Huntemann, Nadja:
Wissensstrukturierung für das Lernen in den Ingenieurwissenschaften
In: 11. Ingenieurpädagogische Regionaltagung 2016 - Technische Bildung im Spannungsfeld zwischen beruflicher und
akademischer Bildung, 23. - 25. Juni 2016, Hamburg
Mehner, Hannes; Weise, Christoph; Schwebke, Silvan; Hampl, Stefan; Hoffmann, Martin:
Autonomer Mikrosensor zur Integration von Stoßereignissen
In: 8. GMM-Workshop Energieautarke Sensorik - EAS 2016, Renningen, 25.-26. Februar 2016
Mehner, Hannes; Müller, Lutz; Biermann, Steffen; Hänschke, Frank; Hoffmann, Martin:
Process flow to integrate nanostructures on silicon grass in surface micromachined systems
In: Proceedings of the 27th Micromechanics Europe Workshop, 28.-30. August 2016, Cork, Ireland
Mehner, Hannes; Müller, Lutz; Biermann, Steffen; Hoffmann, Martin:
Prozesskette zur Integration Siliciumgras-basierter nanostrukturierter Flächen in Oberflächen-MEMS
In: 6. GMM-Workshop Mikro-Nano-Integration – MNI 2016, Duisburg, 05.-06. Oktober 2016
Müller, Jens; Hannapel, Thomas; Hoffmann, Martin; Jacobs, Heiko O.; Lei, Yong; Rangelow, Ivo W.; Schaaf, Peter:
Application of nanostructuring, nanomaterials and micro-nano-integration for improved components and
system's performance
In: Pan Pacific Microelectronics Symposium 2016 (PAN PAC 2016) : Kohala Coast, Hawaii, USA, 25-28 January 2016. -
Red Hook, NY : Curran Associates, Inc. . - 2016, pp. 13-22
Müller, Lutz; Mehner, Hannes; Hoffmann, Martin:
MEMS gas ionization sensor with palladium nanostructures for use at ambient pressure
In: Proceedings of the 27th Micromechanics Europe Workshop, 28.-30. August 2016, Cork, Irland
Müller, Lutz; Maier, Konrad; Helwig, Andreas; Hoffmann, Martin:
Katalytische Silicium-Platin-Nanostrukturen für Niedertemperatur MEMS Wasserstoffsensoren
In: 6. GMM-Workshop Mikro-Nano-Integration – MNI 2016, Duisburg, 05.-06. Oktober 2016
Si, Shuhao; Hoffmann, Martin:
Consecutive imprinting performance of large area UV nanoimprint lithography using bi-layer soft stamps in
oxygen-containing atmosphere
In: 42nd Micro and Nano Engineering (MNE), 19.-23. September 2016, Wien, Österreich
Si, Shuhao; Dittrich, Lars; Hoffmann, Martin:
Low cost and large area fabrication of nanoimprint templates with tunable feature sizes
In: 15th International Conference on Nanoimpirint & Nanoprint Technology (NNT), 26.-28. September 2016, Braga, Portugal
Silva Cortes, V.; Podoskin, D.; Stegner, J.; Fischer, Michael; Gropp, Sebastian; Hein, M. A.; Müller, Jens, Hoffmann,
Martin; Weigel, R.; Fischer, G.; Hagelauer, A.:
Evaluation of a multiphysical RF MEMS oscillator based on LTE receiver performance requirements
In: International Conference on Microwave, Radar and Wireless Communications (MIKON), Krakow, Polen, 09.-11. Mai 2016
Stegner, J.; Fischer, Michael; Gropp, Sebastian; Podoskin, D.; Stehr, U.; Müller, Jens; Hoffmann, Martin; Hein, M. A.:
Compact low phase-noise MEMS-based RF oscillator on a dedicated silicon-ceramic composite substrate
In: European Microwave Conference 2016 (EuMC), London, England, 04.-06. Oktober 2016
Stegner, J.; Stehr, U.; Podoskin, D.; Gropp, Sebastian; Fischer, Michael; Hoffmann, Martin; Müller, Jens; Hein, M. A.:
Hybrid-integrated RF MEMS-based reference oscillator using a silicon-ceramic composite substrate
In: IEEE Xplore digital library. - New York, NY : IEEE. - 2016, S. 353-356; German Microwave Conference 2016 (GeMiC),
Bochum, Deutschland, 14.-16. März 2016
Weigel, Christoph; Schneider, Mike; Hoffmann, Martin:
Nicht-elektrischer Sensor für den Sauerstoffnachweis in Verpackungen mittels natürlicher Fettsäuren
In: 8. GMM-Workshop Energieautarke Sensorik - EAS 2016, Renningen, 25.-26. Februar 2016
Weigel, Christoph; Markweg, Eric; Hoffmann, Martin:
A monolithic micro-optical interferometer etched into fused silica
In: 42nd Micro and Nano Engineering (MNE), 19.-23. September 2016, Wien, Österreich
2015
Endrödy, Csaba; Mehner, Hannes; Grewe, Adrian; Sinzinger, Stefan; Hoffmann, Martin:
2D stepping drive for hyperspectral systems
In: Journal of Micromechanics and Microengineering 25 (7)
DOI: 10.1088/0960-1317/25/7/074002
Endrödy, Csaba; Mehner, Hannes; Grewe, Adrian; Hoffmann, Martin:
Linear micromechanical stepping drive for pinhole array positioning
In: Journal of Micromechanics and Microengineering 25 (5), p. 55009
DOI: 10.1088/0960-1317/25/5/055009
Fischer, Michael; Gropp, Sebastian; Nowak, Jacek; Capraro, Beate; Sommer, Ralf; Hoffmann, Martin; Müller, Jens:
Radio Frequency Microlectromechanical System-Platform based on Silicon-Ceramic Composite Substrates
In: Journal of Microelectronics and Electronic Packaging (2015) 12, pp. 37-42
DOI: 10.4071/imaps.442
Goj, Boris; Dressler, Lothar; Hoffmann, Martin:
Design and characterization of a resonant triaxial microprobe
In: Journal of Micromechanics and Microengineering 25 (2015) 125011
DOI: 10.1088/0960-1317/25/12/125011
Gropp, Sebastian; Fischer, Michael; Dittrich, Lars; Capraro, Beate; Müller, Jens; Hoffmann, Martin:
Wetting behaviour of glasses on nanostructured silicon surfaces
In: Journal of Electrical Engineering Volume 3, Number 1, January 2015 (Serial Number 7)
DOI: 10.17265/2328-2223/2015.01.002
Hillenbrand, Matthias; Weiss, Robert; Endrödy, Csaba; Grewe, Adrian; Hoffmann, Martin; Sinzinger, Stefan:
Chromatic confocal matrix sensor with actuated pinhole arrays
In: Applied Optics 54 (15), pp. 4927-4936
DOI: 10.1364/AO.54.004927
Mehner, Hannes; Weise, C.; Schwebke, Silvan; Hampl, Stefan; Hoffmann, Martin:
A passive microsystem for detecting multiple acceleration events beyond a threshold
In: Microelectronic Engineering, Volume 145, 1 September 2015, pp. 104-111
DOI: 10.1016/j.mee.2015.03.023
Weigel, Christoph; Schneider, Mike; Schmitt, Jean; Hoffmann, Martin; Kahl, Sebastian; Jurisch, Reinhard:
Self-sufficient sensor for oxygen detection in packaging via radio-frequency identification
In: Journal of Sensors and Sensor Systems, Volume 4 (1), pp. 179-186, 2015
DOI: 10.5194/jsss-4-179-2015
Weinberger, Stefan; Nguyen, Tran Trung; Lecomte, Roméo; Cheriguen, Yahia; Ament, Christoph; Hoffmann, Martin:
Linearized control of an uniaxial micromirror with electrostatic parallel-plate actuation
In: Microsystem Technologies April 2015, Springer Berlin Heidelberg
DOI: 10.1007/s00542-015-2535-2
S. Pal, H. Nong, S. Markmann, N. Kukharczyk, S. R. Valentin, S. Scholz, A. Ludwig, C. Bock, U. Kunze, A. D. Wieck, N. Jukam:
Ultrawide electrical tuning of light matter interaction in a high electron mobility transistor structure
In: Scientific Reports 5, 16812 (2015).
DOI: 10.1038/srep16812
F. Jaehnike, D. V. Pham, R. Anselmann, C. Bock, U. Kunze:
High quality Solution-Processed Silicon Oxide Gate Dielectric applied on Indium Oxide based Thin-Film Transistors
In: ACS Appl. Mater. Interfaces 7, 14011-14017 (2015).
DOI: 10.1021/acsami.5b03105
S. Markmann, H. Nong, S. Pal, N. Hekmat, S. Scholz, N. Kukharchyk, A. Ludwig, S. Dhillon, J. Tignon, X. Marcadet, C. Bock,
U. Kunze, A. D. Wieck, N. Jukam:
Spectral modification of the laser emission of a terahertz quantum cascade laser induced by broad-band double
pulse injection seeding
In: Appl. Phys. Lett. 107, 111103 (2015).
DOI: 10.1063/1.4930993
Endrödy, Csaba; Mehner, Hannes; Grewe, Adrian; Sinzinger, Stefan; Hoffmann, Martin:
2D stepping microdrive for hyperspectral imaging
In: Proceedings SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170K;
04.-06. Mai 2015, Barcelona, Spanien
Endrödy, Csaba; Mehner, Hannes; Hoffmann, Martin:
Zweiachsiger Mikroschrittaktor mit großem Stellweg für die Positionierung von Blenden-Arrays
In: Proceedings MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015, Karlsruhe: VDE Verlag (2015)
ISBN: 978-3-8007-4100-7
Fischer, Michael; Gropp, Sebastian; Nowak, Jacek; Sommer, Ralf; Hoffmann, Martin; Müller, Jens:
RF-MEMS-Platform based on Silicon-Ceramic-Composite-Substrates
In: Proceedings German Microwave Conference 2015 (GeMic), Nürnberg, 16.-18. März 2015
Fischer, Michael; Welker, Tilo; Gropp, Sebastian; Müller, Jens; Karolewski, D.; Schelestow, K.; Hoffmann, Martin:
Thermisches Verhalten von SiCer – ein innovatives Verbundsubstrat für MEMS
In: Proceedings MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015, Karlsruhe: VDE Verlag (2015)
ISBN: 978-3-8007-4100-7
Goj, Boris; Dressler, Lothar; Hoffmann, Martin:
Ein dreiachsiger, oszillierender Mikrotaster für die Koordinatenmesstechnik
In: Proceedings MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015, Karlsruhe: VDE Verlag (2015)
ISBN: 978-3-8007-4100-7
Gropp, Sebastian; Frank, Astrid; Fischer, Michael; Schäffel, Christoph; Hoffmann, Martin:
Electrostatic parallel-plate MEMS switch on Silicon-Ceramic-Composite-Substrates
In: Proceedings German Microwave Conference 2015 (GeMic), Nürnberg, 16.-18. März 2015
Gropp, Sebastian; Fischer, Michael; Hoffmann, Martin:
Aufbau eines HF-MEMS-Schalters in einem Silicium-Keramik-Verbundsubstrat
In: Proceedings MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015, Karlsruhe: VDE Verlag (2015)
ISBN: 978-3-8007-4100-7
Gropp, Sebastian; Fischer, Michael; Müller, Jens; Hoffmann, Martin:
A hybrid SiCer substrate based on direct glass-based bonding of LTCC and silicon
In: WaferBond'15, 07.-12. Dezember 2015, Braunschweig, Deutschland
Hanitsch, Stefan; Hoffmann, Martin:
Self-aligning mold for hydrogel micro casting
In: Biomedizinische Technik. - Berlin [u.a.]: de Gruyter. - Bd. 60.2015, S1, p. S105
(DGBMT Jahrestagung; 49 (Lübeck): 2015.09.16-18)
Hoffmann, Martin; Mehner, Hannes; Weigel, Christoph:
Non-electrical long-term incident storage for wireless sensors
In: 41nd Micro and Nano Engineering (MNE), 21.-24. September 2015, Den Haag, Niederlande
Krömker, Heidi; Hoffmann, Martin; Huntemann, Nadja:
Anwendungsorientierte Fachlandkarten: Fallbeispiel Mikro-Nano-Integration
In: 10. Ingenieurpädagogische Regionaltagung 2015 - Anwendungsorientierung und Wissenschaftsorientierung
in der Ingenieurbildung, 05.-07.11.2015, Eindhoven, Niederlande
Leopold, Steffen; Paetz, Daniel; Sinzinger, Stefan; Hoffmann, Martin:
The engineered eye - three-dimensional scanning of the object-space
In: Proceedings of the 26th Micromechanics Europe Workshop, 20.-23. September 2015, Toledo, Spanien
Leopold, Steffen; Pätz, Daniel; Sinzinger, Stefan; Hoffmann, Martin:
Das technische Auge – dreidimensionale Abtastung des Objektraums
In: Proceedings MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015, Karlsruhe: VDE Verlag (2015)
ISBN: 978-3-8007-4100-7
Mehner, Hannes; Schwebke, Silvan; Leopold, Steffen; Hoffmann, Martin:
Passive microsensor for binary counting of numerous threshold events
In: Proceedings SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170Z;
04.-06. Mai 2015, Barcelona, Spanien
Mehner, Hannes; Schwekbe, Silvan; Leopold, Steffen; Hoffmann, Martin:
Micromechanical binary counter mechanism for storing off-limit conditions
In: Proceedings of the 26th Micromechanics Europe Workshop, 20.-23. September 2015, Toledo, Spanien
Mehner, Hannes; Weise, C.; Hoffmann, Martin; Schwebke, Silvan; Hampl, Stefan:
Autonomer Mikrosensor zur Integration von Stoßereignissen
In: Proceedings MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015, Karlsruhe: VDE Verlag (2015)
ISBN: 978-3-8007-4100-7
Mehner, Hannes; Leopold, Steffen; Schwebke, Silvan; Hoffmann, Martin:
Autonomer binärer Zähler für die Erfassung von Grenzwertereignissen
In: Proceedings MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015, Karlsruhe: VDE Verlag (2015)
ISBN: 978-3-8007-4100-7
Müller, Lutz; Maier, Konrad; Helwig, Andreas; Müller, Gerhard; Hoffmann, Martin:
Low temperature catalytic combustible hydrogen MEMS gas sensor enhanced by Si-Pt nanostructures
In: 41nd Micro and Nano Engineering (MNE), 21.-24. September 2015, Den Haag, Niederlande
Podoskin, Dmitry; Brückner, Klemens; Nowak, Jacek; Fischer, Michael; Gropp, Sebastian; Hoffmann, Martin;
Müller, Jens; Hein, Matthias A.:
Multi-technology design approach towards integrated MEMS based RF oscillator using Silicon Ceramic
Compound Substrate
In: Proceedings German Microwave Conference 2015 (GeMic), Nürnberg, 16.-18. März 2015
Weigel, Christoph; Hoffmann, Martin; Kahl, Sebastian; Jurisch, Reinhard:
Autonomer RFID-Sensor für den Sauerstoffnachweis in Verpackungen mittels natürlicher Fettsäuren
In: Thüringer Werkstofftag 2015, Weimar, 11. März 2015
Weigel, Christoph; Grewe, Adrian; Hoffmann, Martin:
Design und Fertigung eines optofluidischen Messsystems zur kapnometrischen Überwachung
In: Proceedings MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015, Karlsruhe: VDE Verlag (2015)
ISBN: 978-3-8007-4100-7
Weigel, Christoph; Markweg, Eric; Hoffmann, Martin:
Monolithisch in Kieselglas integriertes Interferometer
In: Proceedings MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015, Karlsruhe: VDE Verlag (2015)
ISBN: 978-3-8007-4100-7
Weigel, Christoph; Hoffmann, Martin; Kahl, Sebastian; Jurisch, Reinhard:
Autonomer Sensor für den Sauerstoffnachweis in Verpackungen mittels natürlicher Fettsäuren
In: Proceedings MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015, Karlsruhe: VDE Verlag (2015)
ISBN: 978-3-8007-4100-7
S. Markmann, H. Nong, S. Pal, N. Hekmat, S. Scholz, N. Kukharchyk, A. Ludwig, S. Dhillon, J. Tignon, X. Marcadet,
C. Bock, U. Kunze, A. D. Wieck, N. Jukam:
Double pulse injection seeding of a Terahertz Quantum Cascade Laser
In: Proceedings of the 40th International Conference on Infrared, Millimeter, and Terahertz Waves, Hongkong (2015).
S. Pal, H. Nong, S. Markmann, N. Kukharczyk, S. R. Valentin, S. Scholz, A. Ludwig, C. Bock, U. Kunze, A. D. Wieck, N. Jukam:
Strong coupling of intersubband resonance in a single triangular well to a THz matamaterial
In: Proceedings of the 40th International Conference on Infrared, Millimeter, and Terahertz Waves, Hongkong (2015).
2014
Goj, Boris; Dressler, Lothar; Hoffmann, Martin:
Semi-contact measurements of three-dimensional surfaces utilizing a resonant uniaxial microprobe
In: Measurement Science and Technology 25 (2014) 064012
DOI: 10.1088/0957-0233/25/6/064012
Müller, Lutz; Käpplinger, I.; Biermann, S.; Brode, Wolfgang; Hoffmann, Martin:
Infrared emitting nanostructures for highly efficient microhotplates
In: Journal of Micromechanics and Microengineering 24 (2014) 035014
DOI: 10.1088/0960-1317/24/3/035014
Weinberger, Stefan; Nguyen, Tran Trung; Ament, Christoph; Hoffmann, Martin:
Quasi-static micromirror with enlarged deflection based on aluminum nitride thin film springs
In: Sensors and Actuators A: Physical 210 (0), 1. April 2014, pp. 165-174
DOI: 10.1016/j.sna.2014.02.017
C. Weber, M. Oberberg, D. Weber, C. Bock, D. V. Pham, U. Kunze:
Improved morphology and performance of solution-processed metal-oxide thin-film transistors due to a
polymer based interface modifier
In: Adv. Mater. Interfaces 1400137 (2014).
DOI: 10.1002/admi.201400137
J. Stella, M. Pohl, C. Bock, U. Kunze:
Influence of grain orientation on the local deformation mode induced by cavitation erosion in a CuSnNi alloy
In: Waer 316, 1 (2014).
DOI: 10.1016/j.wear.2014.04.010
Cu-Nguyen, Phuong-Ha; Grewe, Adrian; Endrödy, Csaba; Sinzinger, Stefan; Zappe, Hans; Seifert, Andreas:
Compact tunable hyperspectral imaging system
In: IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), 2014 /
IEEE International Conference on Micro Electro Mechanical Systems ; 27 (San Francisco, Calif.) : 2014.01.26-30. -
Piscataway, NJ : IEEE (2014), pp. 1167-1170
Endrödy, Csaba; Mehner, Hannes; Grewe, Adrian; Sinziger, Stefan; Hoffmann, Martin:
Two-dimensional stepping drive for hyperspectral systems
In: Proceedings of the 25th Micromechanics Europe Workshop, August 31 - September 3, 2014, Istanbul, Turkey
Fischer, Michael; Gropp, Sebastian; Nowak, Jacek; Capraro, Beate; Hoffmann, Martin; Müller, Jens:
RF-MEMS-Platform based on Silicon-Ceramic-Composite-Substrates
In: Proceedings IMAPS/ACerS 10th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems
Technologies (CICMT 2014), Suita, Japan, April 14 - 16, 2014
Goj, Boris; Bartsch, Heike; Hanitsch, Stefan; Hoffmann, Martin; Müller, Jens:
Temperatur- und Feuchtsensor basierend auf planarisierten LTCC-Oberflächen
In: Mikro-Nano-Integration : Beiträge des 5. GMM-Workshops, 8. - 9. Oktober 2014 in Ilmenau. - Berlin : VDE-Verl. - 2014, S. 127-130
ISBN 978-3-8007-3632-4
Grewe, Adrian; Endrödy, Csaba; Hillenbrand, Matthias; Cu-Nguyen, Phuong-Ha; Seifert, Andreas; Hoffmann, Martin; Sinzinger, Stefan:
Compact hyperchromatic imaging systems based on tunable optical microsystems
In: IEEE Xplore digital library. - New York, NY : IEEE (2014), S. 129 - 130 International Conference on Optical MEMS and
Nanophotonics (OMN), Glasgow, 17 - 21 Aug. 2014
ISSN : 2160-5033; Print ISBN: 978-0-9928-4140-9
Gropp, Sebastian; Fischer, Michael; Dittrich, Lars; Capraro, Beate; Müller, Jens; Hoffmann, Martin:
Wetting behaviour of LTCC and glasses on nanostructured silicon surfaces during sintering
In: Proceedings IMAPS/ACerS 10th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems
Technologies (CICMT 2014), Suita, Japan, April 14 - 16, 2014
Gropp, Sebastian; Fischer, Michael; Hoffmann, Martin:
Wettability of silicon nanostructures by glass melts
In: Proceedings of 40th Micro and Nano Engineering (MNE 2014), Lausanne Switzerland, 22. - 26.09.2014
Günschmann, Sabine; Müller, Lutz; Fischer, Michael; Hoffmann, Martin; Müller, Jens:
Selektive Erzeugung von Nanostrukturen auf einer Waferoberfläche zur Realisierung von optischen und mechanischen
Funktionen beim Aufbau eines Echtzeitölsensors
In: Mikro-Nano-Integration : Beiträge des 5. GMM-Workshops, 8. - 9. Oktober 2014 in Ilmenau. - Berlin : VDE-Verl.. - 2014, pp. 69-74
ISBN 978-3-8007-3632-4
Hampl, Stefan; Leistritz, Bianca; Saft, Benjamin; Hennig, Eckhard; Hoffmann, Martin:
Micromechanical, vertical comb-drive-structures for the construction of an electrostatic energy harvester
In: Proceedings EAS 2014 - 7. GMM-Workshop Energieautarke Sensorik, Magdeburg, 24. - 25.02.2014, pp. 14 - 19
ISBN 978-3-8007-3581-7
Hanitsch, Stefan; Hoffmann, Martin:
Test environment for hydrogels as functional sensor window
In: Proceedings BMT (Biomedizinische Technik) 2013 - Dreiländertagung der Deutschen, Schweizerischen und Österreichischen
Gesellschaft für Biomedizinische Technik, 19. - 21. September, Graz, pp. 693 - 694
Hanitsch, Stefan; Grohmann, S.; Berg, A.; Moje, J.; Hoffmann, Martin:
Method for testing of hydrogel sensor coatings
In: Proceedings BMT 2014, 48. Jahrestagung der DGMBT, Hannover ISSN 0013-5585, pp. S31 - S33
Hanitsch, Stefan; Hampl, Jörg; Fischer, R.; Tobola, J.; Stubenrauch, Mike; Schober, Andreas; Witte, Hartmut; Hoffmann, Martin:
Integration of hydrogels into BioMEMS
In: Shaping the future by engineering : 58th IWK, Ilmenau Scientific Colloquium, Technische Universität Ilmenau,
8 - 12 September 2014 ; programme. - Ilmenau : Univ.-Verl. Ilmenau. - 2014, p. 68
Hoffmann, Martin; Müller, Lutz; Käpplinger, Indira; Biermann, Steffen; Brode, Wolfgang:
Highly efficient IR-emitters based on oriented nanostructures on silicon templates
In: Proceedings of 40th Micro and Nano Engineering (MNE 2014), Lausanne Switzerland, 22. - 26.09.2014
Leopold, Steffen; Pätz, Daniel; Sinzinger, Stefan; Müller, Jens; Hoffmann, Martin:
Hybride Integration von Silicium- und LTCC Technologie zur Herstellung verstimmbarer Zylinderlinsen
In: Mikro-Nano-Integration : Beiträge des 5. GMM-Workshops, 8. - 9. Oktober 2014 in Ilmenau. - Berlin :
VDE-Verl. - 2014, pp. 127-130
ISBN 978-3-8007-3632-4
Markweg, Eric; Hoffmann, Martin; Schädel, Martin; Ortlepp, Hans-Georg; Brodersen, Olaf:
A combined fibre coupling/readout diode chip for use in integrated optical interferometry
In: Tagungsband Smart Systems Integration 2014, Wien, Austria,
(USB stick, ISBN 978-3-86359-201-1)
Markweg, Eric ; Schädel, Martin; Brodersen, Olaf; Ortlepp, Hans Georg; Hoffmann, Martin; Mollenhauer, Olaf:
Mikrotechnische Umsetzung eines integriert optischen Michelson-Interferometers für Auflösungen im Sub-Nanometerbereich
In: Mikro-Nano-Integration : Beiträge des 5. GMM-Workshops, 8. - 9. Oktober 2014 in Ilmenau. - Berlin : VDE-Verl. - 2014, pp. 107-111
ISBN 978-3-8007-3632-4
Mehner, Hannes; Weise, Christoph; Schwebke, Silvan; Hampl, Stefan; Hoffmann, Martin:
A passive microsystem for integrating acceleration loads
In: Proceedings of 40th Micro and Nano Engineering (MNE 2014), Lausanne Switzerland, 22. - 26.09.2014
Mehner, Hannes; Endrödy, Csaba; Hoffmann, Martin:
Linear stepping microactuator for hyperspectral systems
In: Optical MEMS and Nanophotonics (OMN), 2014; International Conference on Optical MEMS and Nanophotonics,
17-21 Aug. 2014, Glasgow, pp. 117 - 118 ISSN: 2160-5033; Print ISBN: 978-0-9928-4140-9
Müller, Lutz; Käpplinger, Indira; Brode, Wolfgang; Hoffmann, Martin:
Funktionale Nanostrukturen für hocheffiziente Infrarotemitter in der Sensortechnik
In: Thüringer Werkstofftag 2014. - Jena
Müller, Lutz; Günschmann, Sabine; Fischer, Michael; Müller, Jens; Hoffmann, Martin; Käpplinger, Indira; Brode, Wolfgang:
Entwicklung und Optimierung mikrotechnischer Silizium- und Keramikkomponenten zur Realisierung eines Fluidiksensors
In: 17. ITG-/GMA-Fachtagung Sensoren und Messsysteme 2014, Nürnberg, Germany, 03. - 04. Juni 2014
Müller, Lutz; Günschmann, Sabine; Fischer, Michael; Müller, Jens; Käpplinger, Indira; Biermann, Steffen; Brode, Wolfgang;
Hoffmann, Martin:
Nanostrukturen als Problemlöser – Emissionserhöhung und Interferenzvermeidung am Beispiel eines IR-basierten Fluidsensors
In: Mikro-Nano-Integration : Beiträge des 5. GMM-Workshops, 8. - 9. Oktober 2014 in Ilmenau. - Berlin : VDE-Verl. - 2014, pp. 127-130
ISBN 978-3-8007-3632-4
Pätz, Daniel; Leopold, Steffen; Hoffmann, Martin; Sinzinger, Stefan:
Tunable anamorphotic imaging system based on fluidic cylindrical lenses
In: IEEE Xplore digital library. - New York, NY : IEEE. - 2014, pp. 25-26 International Conference on Optical MEMS and
Nanophotonics (OMN) ; (Glasgow) : 2014.08.17-21
Podoskin, Dmitry; Shaukat, Navel; Brückner, Klemens; Blau, Kurt; Mehner, Hannes; Gropp, Sebastian; Hoffmann, Martin; Hein,
Matthias A.:
RF oscillators based on piezoelectric aluminium nitride MEMS resonators
In: GeMiC 2014 / German Microwave Conference ; (Aachen) : 2014.03.10-12. - Berlin [u.a.] : VDE-Verl. (2014), insges. 4 S.
Saft, Benjamin; Schäfer, Eric; Jäger, André; Hampl, Stefan; Leistritz, Bianca; Hennig, Eckhard:
Eine Systemarchitektur für ein integriertes elektrostatisches MEMS-Energy-Harvesting-Modul
In: Proceedings ANALOG 2014 - 14. GMM/ITG-Fachtagung, Hannover, 17.-19.09.2014, pp. 60 - 65
ISBN 978-3-8007-3639-3
Stubenrauch, Mike; Hanitsch, Stefan; Fischer, Robert; Bartsch, Heike; Straube, Anja; Hoffmann, Martin; Witte, Hartmut:
BioMEMS for analysis and synthesis in life sciences
In: Biomedizinische Technik. - Berlin [u.a.] : de Gruyter. - Bd. 59.2014, Suppl. 1, p. S127 DGBMT Jahrestagung ; 48 (Hannover) : 2014.10.08-10
Vorbringer-Dorozhovets, Nataliya; Goj, Boris; Machleidt, Torsten; Franke, Karl-Heinz; Hoffmann, Martin; Manske, Eberhard:
Multifunctional nanoanalytics and long-range scanning probe microscope using a nanopositioning and nanomeasuring machine
In: Measurement science and technology. - Bristol : IOP Publ. Ltd. - Bd. 25.2014, 4, p. 044006, insges. 7 S. NanoScale Seminar ;
(Paris) : 2013.04.25-26
Weigel, Christoph; Schneider, Mike; Hoffmann, Martin; Kahl, Sebastian; Jurisch, Reinhard:
Niedrig-Energie-Sensor für den Sauerstoffnachweis in Verpackungen mittels RFID
In: 17. ITG-/GMA-Fachtagung Sensoren und Messsysteme 2014, Nürnberg, Germany, 03. - 04. Juni 2014
Integration of nanostructured silicon for improving IR-transmission of an optical measurement cuvette
In: 1st International Conference and 3rd International MacroNano-Colloquium on the Challenges and Perspectives of Functioal
Nanostructures (CPFN), Ilmenau, July 30, 2014/p>
Weigel, Christoph; Mehner, Hannes; Schneider, Mike; Hoffmann, Martin:
Passive RFID-auslesbare Sensorik für Verpackungen
In: Workshop Funktionalisierte Verpackungen - Mehrwert beim Kunden erzeugen, Rudolstadt, Germany, 02. Dezember 2014
2013
Goj, Boris; Dressler, Lothar; Hoffmann, Martin:
Resonant probing system comprising a high accurate uniaxial nanoprobe and a new evaluation unit
In: Journal of Micromechanics and Microengineering 23 (2013) 095012
DOI: 10.1088/0960-1317/23/9/095012
Goj, Boris; Dressler, Lothar; Hoffmann, Martin:
Resonant biaxial nanoprobe utilized for non-contact surface measurements
In: Sensors & Transducers Journal 157 (2013), no. 10, pp. 392-399 ISSN 1726-5479
Link
Leopold, Steffen; Polster, Tobias; Paetz, Daniel; Knoebber, Fabian; Ambacher, Oliver; Sinzinger, Stefan; Hoffmann, Martin:
MOEMS tunable microlens made of aluminum nitride membranes
In: J. Micro/Nanolith. MEMS MOEMS 12(2), 023012 (Jun 10, 2013)
DOI: 10.1117/1.JMM.12.2.023012
Leopold, Steffen; Müller, Lutz; Kremin, Christoph; Hoffmann, Martin:
Online monitoring of the passivation breakthrough during deep reactive ion etching of silicon using optical plasma
emission spectroscopy
In: Journal of Micromechanics and Microengineering 23 (2013) 074001
DOI: 10.1088/0960-1317/23/7/074001
Mehner, Hannes; Leopold, Steffen; Hoffmann, Martin:
Variation of the intrinsic stress gradient in thin aluminum nitride films
In: Journal of Micromechanics and Microengineering 23 (2013) 095030
DOI: 10.1088/0960-1317/23/9/095030
Dittrich, Lars; Endrödy, Csaba; Hoffmann, Martin:
Mikropumpe mit elektrostatischem Direktantrieb
In: Proceedings MikroSystemTechnik Kongress 2013, 14.-16. Oktober 2013, Aachen: VDE Verlag (2013)
ISBN 978-3-8007-3555-6
Geiling, Thomas; Dressler, Lothar; Welker, Tilo; Hoffmann, Martin:
Fine Dust Measurement with Electrical Fields - Concept of a Hybrid Particle Detector
In: Proceedings 9th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies,
Orlando, FL-USA, April 23-25. 2013, 6pp
Goj, Boris; Dressler, Lothar; Hoffmann, Martin:
Non-contact biaxial nanoprobe utilized for surface measurements of MEMS
In: Proceedings TechConnect World 2013, Washington D.C.: CRC-Press, United States of America (2013)
ISBN: 978-1-4822-0579-4
Goj, Boris; Dressler, Lothar; Hoffmann, Martin:
Non-contact measurements of three-dimensional surfaces utilizing a miniaturized uniaxial nanoprobe
In: Proceedings 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII),
Aachen: Apprimus Verlag, Germany (2013)
ISBN: 978-3-86359-138-0
Goj, Boris; Dressler, Lothar; Hoffmann, Martin:
Resonanter berührungsloser Mikrotastkopf in Silicium-Mikromechanik
In: Proceedings MikroSystemTechnik Kongress 2013, 14.-16. Oktober 2013, Aachen: VDE Verlag (2013)
ISBN 978-3-8007-3555-6
Grewe, Adrian; Hillenbrand, Matthias; Endrödy, Csaba; Hoffmann, Martin; Sinzinger, Stefan:
Advanced phase plates for confocal hyperspectral imaging systems
In: Optics infobase. - Washington, DC : (2013), insges. 3 S. Applied Industrial Optics: Spectroscopy, Imaging and
Metrology Arlington, Virginia United States June 23-27, 2013
ISBN: 978-1-55752-975-6 Industrial Applications of Imaging (AW1B)
Grewe, Adrian; Sinzinger, Stefan; Hoffmann, Martin; Endrödy, Csaba; Fütterer, Richard; Linß, Gerhard;
Seifert, Stefan; Kley, Ernst-Bernhard; Nguyen, P.; Steiner, Stefan:
Opto-mechanische Mikrosysteme zur hyperspektralen Bildgebung
In: Proceedings MikroSystemTechnik Kongress 2013, 14.-16. Oktober 2013, Aachen: VDE Verlag (2013)
ISBN 978-3-8007-3555-6
Hampl, Stefan; Hoffmann, Martin:
Piezoelektrische AlN-Bimorphe als niederfrequent-resonante Mikroaktoren mit großem Stellweg
In: Proceedings MikroSystemTechnik Kongress 2013, 14.-16. Oktober 2013, Aachen: VDE Verlag (2013)
ISBN 978-3-8007-3555-6
Hampl, Stefan; Leistritz, Bianca; Saft, Benjamin; Hoffmann, Martin; Hennig, Eckhard:
Ein- und mehrlagige vertikale Comb-Drive-Strukturen zur kapazitiven, niederfrequenten Energiegewinnung
In: Proceedings MikroSystemTechnik Kongress 2013, 14.-16. Oktober 2013, Aachen: VDE Verlag (2013)
ISBN 978-3-8007-3555-6
Hanitsch, S.; Hoffmann, M.:
Test environment for hydrogels as functional sensor window
In: Biomedizinische Technik. - Berlin [u.a.] : de Gruyter . - Bd. 58.2013, Suppl. 1, pp. 693-694; BMT; (Graz) : 2013.09.19-21
Hoffmann, Martin; Goj, Boris ; Dressler, Lothar:
Kontaktlose Oberflächenantastung in bis zu drei Raumrichtungen zur Vermeidung von Sticking-Effekten
in der Koordinatenmesstechnik
In: 6. Kolloquium Mikroproduktion : Braunschweig, 8. Oktober 2013. - Aachen : Shaker. - 2013, B23, insges. 6 S.
Laqua, Daniel; Hampl, Stefan; Hoffmann, Martin; Husar, Peter:
Proof of concept for energy harvesting using piezoelectric microstructures for intelligent implants using eye-motion
classified with the integrated eyetracker
In: World Congress on Medical Physics and Biomedical Engineering ; Vol. 2. - [Berlin] : Springer. - 2013, pp. 1397-1400
Leopold, Steffen; Pätz, Daniel ; Knöbber, Fabian; Ambacher, Oliver; Sinzinger, Stefan; Hoffmann, Martin:
Tunable cylindrical microlenses based on aluminum nitride membranes
In: Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 861611 (March 13, 2013)
Leopold, Steffen; Geiling, Thomas; Fliegner, Caroline; Pätz, Daniel; Sinzinger, Stefan; Müller, Jens; Hoffmann, Martin:
Multifunctional LTCC Substrates for Thermal Actuation of Tunable Micro-Lenses Made of Aluminum Nitride Membranes
In: Proceedings 9th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems
Technologies, Orlando,
FL-USA, April 23-25. 2013, 7pp
Leopold, Steffen; Pätz, Daniel ; Sinzinger, Stefan; Hoffmann, Martin:
Adaptive Mikrolinsen basierend auf Aluminiumnitird Membranen
In: Proceedings MikroSystemTechnik Kongress 2013, 14.-16. Oktober 2013, Aachen: VDE Verlag (2013)
ISBN 978-3-8007-3555-6
Markweg, Eric; Hoffmann, Martin:
Optical scanners based on thermo-optical tuning of an integrated-optical waveguide mode
In: Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 86160A (March 13, 2013)
Markweg, Eric; Schädel, Martin; Nguyen, Tran-Trung; Brodersen, Olaf; Ament, Christoph; Hoffmann, Martin:
Integration of a position photodiode for a micro multi laser tracker system
In: Smart Systems Integration 2013, Amsterdam, March 13-14, 2013 / T. Gessner (Editor). - VDE Verlag
ISBN 978-3-8007-3490-0
Markweg, Eric; Nguyen, Tran-Trung; Weinberger, Stefan; Ament, Christoph; Hoffmann, Martin:
Mikrolasertracker zur multisensorischen 3D-Koordinatenmessung
In: Proceedings MikroSystemTechnik Kongress 2013, 14.-16. Oktober 2013, Aachen: VDE Verlag (2013)
ISBN 978-3-8007-3555-6
Mehner, Hannes; Leopold, Steffen; Hoffmann, Martin:
Variation des intrinsischen Stressgradienten dünner Aluminiumnitridschichten
In: Proceedings MikroSystemTechnik Kongress 2013, 14.-16. Oktober 2013, Aachen: VDE Verlag (2013)
ISBN 978-3-8007-3555-6
Müller, Lutz; Käpplinger, Indira; Biermann, Steffen; Brode, Wolfgang; Hoffmann, Martin:
Thermal infrared emitter featuring micro-nanostructures with high emission
In: Proceedings of the 24th Micromechanics Europe Workshop, Aalto, Finland (2013)
Müller, Lutz; Käpplinger, Indira; Biermann, Steffen; Brode, Wolfgang; Hoffmann, Martin:
Silicium-Platin Nanostrukturen für hochgradig Infrarot-emissive Oberflächen in Hotplate-Emittern
In: Proceedings MikroSystemTechnik Kongress 2013, 14.-16. Oktober 2013, Aachen: VDE Verlag (2013)
ISBN 978-3-8007-3555-6
Pätz, Daniel; Sinzinger, Stefan; Leopold, Steffen; Hoffmann, Martin:
Imaging systems with aspherically tunable micro-optical elements
In: Optics infobase. - Washington, DC : (2013), insges. 3 S. Applied Industrial Optics: Spectroscopy,
Imaging and Metrology Arlington, Virginia United States June 23-27, 2013
ISBN: 978-1-55752-975-6 Industrial Applications of Imaging (AW1B)
Podoskin, B.; Brueckner, K.; Blau, K.; Mehner, H.; Hoffmann, M.; Hein, M. A.:
Piezoelectric aluminum nitride MEMS resonators for RF oscillator integrated circuits
In: Proceedings of the 24th Micromechanics Europe Workshop, Aalto, Finland (2013)
Vorbringer-Dorozhovets, Nataliya; Goj, Boris; Machleidt, Torsten; Franke, Karl-Heinz; Hoffmann, Martin; Manske, Eberhard:
Multifunctional nanoanalytics and long-range SPM based on NPM machine
In: Nanoscale 2013 : 10th Seminar on Nanoscale Calibration Standards and Methods ; 6th Seminar on Quantitative
Microscopy ; dimensional and related measurements in the micro- and nanometre range ;
Athènes Services, Paris, April 25th - 26th, 2013. - [s.l.]. - 2013, p. 85
Weinberger, Stefan; Hoffmann, Martin:
Aluminum nitride supported 1D micromirror with static rotation angle >11°
In: Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 86160E (March 13, 2013)
2012
Bartsch, Heike; Albrecht, Arne; Hoffmann, Martin; Müller, Jens:
Micro forming process for embossing of LTCC tapes
In: J. Micromech. Microeng. 22 (2012) 015004
DOI: 10.1088/0960-1317/22/1/015004
C. Bock, S. Weingart, E. Karaissaridis, U. Kunze, F. Speck and Th. Seyller:
Influence of structural properties on ballistic transport in nanoscale epitaxial graphene cross junctions
In: Nanotechnology 23, 395203 (2012).
DOI: 10.1088/0957-4484/23/39/395203
K. Xu, A. P. Milanov, H. Parala, C. Wenger, C. Baristiran-Kaynak, K. Lakribssi, T. Toader, C. Bock, D. Rogalla,
H.-W. Becker, U. Kunze, A. Devi:
Atomic layer deposition of HfO2 thin films employing a heteroleptic Hafnium precursor
In: Chem. Vap. Deposition 18, 27-35 (2012).
DOI: 10.1002/cvde.201106934
M. Szelong, U. Wieser, M. Knop, U. Kunze, D. Reuter, A.D. Wieck:
Hall effect in an asymmetric ballistic cross junction
In: Nature Conference "Frontiers in Electronic Materials", June 17th to 20th 2012, Aachen, 443-444 (2012).
DOI: 10.1002/9783527667703.ch63
J.F. von Pock, D. Salloch, U. Wieser, U. Kunze, T. Hackbarth:
Elimination of hot-electron thermopower from ballistic rectification using a dual-cross device
In: Nature Conference "Frontiers in Electronic Materials", June 17th to 20th 2012, Aachen, 445-446 (2012).
DOI: 10.1002/9783527667703.ch63
K. Xu, R. Ranjith, A. Laha, H. Parala, A. P. Milanov, R. Fischer, E. Bugiel, J. Feydt, S. Irsen, T. Toader, C. Bock,
D. Rogalla, H.-J. Osten, U. Kunze, A. Devi:
Atomic layer deposition of Gd2O3 and Dy2O3: A study of the ALD characteristics and structural and
electrical properties
In: Chemistry of Materials 24, 651 (2012).
DOI: 10.1021/cm2020862
Dittrich, Lars; Hoffmann, Martin:
Sorting and processing station for segmented flow applications based on electrowetting on dielectrics
6th Workshop "Chemical and Biological Micro Laboratory Technology", Elgersburg, Germany, March 20-22, 2012
Dittrich, Lars; Endrödy, Csaba; Hoffmann, Martin:
Resonant electrostatic actuation of water on closed lyophobic microstructures
8th International Meeting on Electrowetting, Athen, Greece, June 21-23, 2012
Dittrich, Lars; Endrödy, Csaba; Hoffmann, Martin:
Dimensionierung und Technologiekonzept für eine neuartige Mikropumpe ohne bewegliche mechanische Teile
In: GMM-Fachbericht Band 74, 4. GMM-Workshop Mikro-Nano-Integration, Berlin, 12.-13.11.2012
ISBN 978-3-8007-3437-3
Dittrich, Lars; Endrödy, Csaba; Hoffmann, Martin:
Design and technology concept for a novel micropump coping without moving mechanical components
In: Proceedings of the 23rd Micromechanics Europe Workshop, Ilmenau, Germany (2012)
ISBN: 978-3-938843-71-0
Geiling, Thomas; Leopold, Steffen; Cheriguen, Yahia; Hoffmann, Martin:
Fine dust measurement with electrical fields concept for a capacitive setup
In: Proceedings of the 23rd Micromechanics Europe Workshop, Ilmenau, Germany (2012) ISBN: 978-3-938843-71-0
Goj, Boris; Hoffmann, Martin:
Design of a biaxial nanoprobe utilizing Matlab Simulink
In: Proceedings of the 23rd Micromechanics Europe Workshop, Ilmenau, Germany (2012)
ISBN: 978-3-938843-71-0
Goj, Boris; Vorbringer-Dorzhovets, Nataliya; Wystup, Clemens; Manske, Eberhard; Hoffmann, Martin:
Electromagnetic changer for AFM-tips
In: Proceedings of the 23rd Micromechanics Europe Workshop, Ilmenau, Germany (2012)
ISBN: 978-3-938843-71-0
Goj, Boris; Hoffmann, Martin:
Resonant nanoprobe with integrated measurement system
In: Conference Proceedings Actuator 2012, Bremen, Germany (2012), pp. 726-729
ISBN 978-3-933339-19-5
Hampl, Stefan; Hoffmann, Martin:
Piezoelektrischer AlN-Bimorph als resonanter Mikroaktor
In: Conference Proceedings 11. Chemnitzer Fachtagung Mikrosystemtechnik,
Chemnitz, Germany, 23.-24. Oktober 2012, pp. 102-106
ISBN-978-3-00-039162-0
Hebel, Robert; Dittrich, Lars; Hoffmann, Martin:
On the influence of laser cutting manufacturing tolerances on the spring rate of machined tubular springs
In: Proceedings of the 23rd Micromechanics Europe Workshop, Ilmenau, Germany (2012)
ISBN: 978-3-938843-71-0
Hillenbrand, Matthias; Markweg, Eric; Hoffmann, Martin; Sinzinger, Stefan:
Integrated Hybrid GRIN Lenses
In: Proceedings DGaO Jahrestagung, Eindhoven, 29.5 - 2.6.2012
ISSN: 1614-8436
Laqua, Daniel; Hampl, Stefan; Hoffmann, Martin; Husar, Peter:
Proof of concept for energy harvesting using piezoelectric microstructures for intelligent implants using
eye-motion classified with the Integrated Eyetracker
In: IFMBE Proceedings 39, 2012, World Congress on Medical Physics and Biomedical Engineering,
Beijing, China, May 26-31, 2012, pp. 1397-1400
ISBN: 978-3-642-29304-7
Leopold, Steffen; Kremin, Christoph; Hoffmann, Martin:
Controlled silicon grass generation using optical plasma emission spectroscopy
In: Proceedings of the 23rd Micromechanics Europe Workshop, Ilmenau, Germany (2012)
ISBN: 978-3-938843-71-0
Leopold, Steffen; Becker, Annette; Pätz, Daniel; Knöbber, Fabian; Ambacher, Oliver; Sinzinger, Stefan, Hoffmann, Martin:
Needlelike Nanostructures on Aluminum Nitride Membranes for Dynamic Lenses using Thermo-Capillarity
In: 38th International Conference on Micro and Nano Engineering, Toulouse, France (2012)
Markweg, Eric; Hillenbrand, Matthias, Sinzinger, Stefan, Hoffmann, Martin:
Planar plano-convex microlens in silica using ICP-CVD and DRIE
In: Proc. SPIE 8550, Optical Systems Design 2012, 85500T (2012)
Mehner, Hannes; Brueckner, Klemens; Karolewski, D.; Michael, Steffen; Hein, Matthias; Hoffmann, Martin:
Stress controlled piezoelectric AlN-MEMS-Resonators with molybdenum electrodes for GHz applications
In: Proceedings of the 23rd Micromechanics Europe Workshop, Ilmenau, Germany (2012)
ISBN: 978-3-938843-71-0
Müller, Lutz; Hoffmann, Martin:
Silicium-Metall Nanostrukturen mit ultrahoher Absorption im infraroten Strahlungsbereich
In: GMM-Fachbericht Band 74, 4. GMM-Workshop Mikro-Nano-Integration, Berlin, 12.-13.11.2012
ISBN 978-3-8007-3437-3
Weinberger, Stefan; Cheriguen, Yahia; Hoffmann, Martin:
Static large-angle micromirror with aluminum nitride springs
In: Proceedings of the 23rd Micromechanics Europe Workshop, Ilmenau, Germany (2012)
ISBN: 978-3-938843-71-0
M. Szelong, U. Wieser, M. Knop, U. Kunze, D. Reuter, A.D. Wieck:
Hall effect in an asymmetric ballistic cross junction
In: Nature Conference "Frontiers in Electronic Materials", June 17th to 20th 2012, Aachen, 443-444 (2012).
DOI: 10.1002/9783527667703.ch63
J.F. von Pock, D. Salloch, U. Wieser, U. Kunze, T. Hackbarth:
Elimination of hot-electron thermopower from ballistic rectification using a dual-cross device
In: Nature Conference "Frontiers in Electronic Materials", June 17th to 20th 2012, Aachen, 445-446 (2012).
DOI: 10.1002/9783527667703.ch63
2011
Heidrich, N.; Hampl, Stefan; Laqua, D.; Cimalla, Volker; Hoffmann, Martin; Husar, Peter:
Biocompatible piezoelectric microstructures utilizing eye motion for self-sufficient IOP-sensor devices
In: Biomedizinische Technik, Bd. 56, Berlin: de Gruyter (2011) ISSN 1862-278X.
DOI: 10.1515/bmt.2011.821
Leopold, Steffen; Kremin, Christoph; Ulbrich, Angela; Krischok, Stefan; Hoffmann, Martin:
Formation of silicon grass: Nanomasking by carbon clusters in cyclic deep reactive ion etching
In: Journal of Vacuum Science & Technology B (Vol. 29, Issue 1) (2011)
DOI: 10.1116/1.3521490
Sánchez-Ferrer, Antoni; Fischl, Tamás; Stubenrauch, Mike; Albrecht, Arne; Wurmus, Helmut; Hoffmann, Martin;
Finkelmann, Heino:
Liquid-crystalline elastomer microvalve for microfluidics
In: Advanced materials, Bd. 23, pp. 4526-4530, Weinheim: Wiley VCH (2011) ISSN 1521-4095
DOI: 10.1002/adma.201102277
Witte, Hartmut; Stubenrauch, Mike; Fröber, Ulrike; Fischer, Robert; Voges, Danja; Hoffmann, Martin:
Integration of 3-D cell cultures in fluidic microsystems for biological screenings
In: Engineering in life sciences, Bd. 11, pp. 140-147, Weinheim : Wiley-VCH (2011) ISSN 1618-2863
DOI: 10.1002/elsc.201000045
D. Salloch, U. Wieser, U. Kunze and T. Hackbarth:
Separation of the inertial-ballistic signal from hot-electron thermopower in an injection-type ballistic rectifier
In: "Physics of Semiconductors" (ICPS-30, Seoul, Korea 2010), ed. by J. Ihm and H. Cheong,
American Institute of Physics Conference Proceedings 1399, pp. 321-322 (2011).
DOI: 10.1063/1.3666383
D. Salloch, U. Wieser, U. Kunze and T. Hackbarth:
Influence of channel width on the performance of an injection-type ballistic rectifier: Carrier injection
versus hot-electron thermopower
In: Microelectronic Engineering 88, 2386-2389 (2011).
DOI: 10.1016/j.mee.2011.02.079
D. Bekermann, A. Ludwig, T. Toader, C. Maccato, D. Barreca, A. Gasparotto, C. Bock, A. D. Wieck, U. Kunze,
E. Tondello, R. A. Fischer, and A. Devi:
MOCVD of ZnO films from Bis(Ketoiminato)Zn(II) precursors: structure, morphology and optical properties
In: Chem. Vap. Deposition 17, 155-161 (2011).
DOI: 10.1002/cvde.201006898
Burkhardt, T.; Kamm, A.; Hornaff, M.; Beckert, E.; Eberhardt, R.; Tünnermann, A.; Gebhardt, S. E.; Müller, J.;
Hoffmann, Martin; Bruchmann, C.:
Smarte adaptiv-optische Mikrosysteme - Aufbautechnologie und thermomechanische Charakterisierung
In: MikroSystemTechnik KONGRESS 2011, 10.-12. Oktober 2011 / Darmstadt, Proceedings. - VDE Verlag (Hrsg.), CD-ROM
ISBN 978-3-8007-3367-5
Dittrich, Lars; Hoffmann, Martin:
Virtuelle Membranaktoren auf Nanostrukturen in Mikropumpen
In: 3. GMM-Workshop Mikro-Nano-Integration, März 2011, Stuttgart
ISBN 9783800733347
Goj, Boris; Hoffmann, Martin:
Design of a Triaxial Resonant Nanoprobe Fully Integrated in a Silicon Substrate
In: Proceedings of the 22nd Micromechanics and Microsystems Europe Workshop, Tönsberg, Norway (2011)
ISBN: 978-82-7860-224-9
Goj, Boris; Dittrich, Lars; Dummstorff, Gerrit; Erbe, Torsten; Hoffmann, Martin:
Entwurf und Herstellung hybrider dreiachsiger Sensormodulkonzepte
In: MikroSystemTechnik KONGRESS 2011, 10.-12. Oktober 2011 / Darmstadt, Proceedings. - VDE Verlag (Hrsg.), CD-ROM
ISBN 978-3-8007-3367-5
Hampl, Stefan; Cimalla, Volker; Polster, Tobias; Hoffmann, Martin:
AlN-based piezoelectric bimorph microgenerator utilizing low-level non-resonant excitation
In: Proc. SPIE 8066, 80661E (2011)
Hampl, Stefan; Laqua, D.; Heidrich, Nicola; Cimalla, Volker; Lebedev, Vadim; Polster, Tobias; Hoffmann, Martin:
AlN-basierte piezoelektrische Mikrogeneratoren zur Energieversorgung miniaturisierter Implantate
In: MikroSystemTechnik KONGRESS 2011, 10.-12. Oktober 2011 / Darmstadt, Proceedings. - VDE Verlag (Hrsg.), CD-ROM
ISBN 978-3-8007-3367-5
Hoffmann, Martin; Bartsch, Heike; Fischer, Michael; Hampl, Stefan; Kremin, Christoph; Leopold, Steffen; Müller, Jens;
Polster, Tobias; Stubenrauch, Mike:
Mikro-Nano-Integration in der Sensorik - Nanostrukturen als neue Option
In: 10. Dresdner Sensor-Symposium, Dresden, 5.-7. Dezember 2011, Dresdner Beiträge zur Sensorik.
- Gerald Gerlach (Hrsg.), Band 43
ISBN 978-3-942710-53-4
Hoffmann, Martin; Kremin, Chris; Stubenrauch, Mike; Fröber, Ullrike; Polster, Tobias; Fischer, Michael; Bartsch de Torres,
Heike; Müller, Jens; Sinzinger, Stefan; Witte, Helmut:
Integration von nanostrukturierten Materialien in mikrofluidische Systeme: Perspektiven und Herausforderungen
In: Proceedings 7. Deutsches BioSensor Symposium, S. 25-26, Heilbad Heiligenstadt (2011)
ISBN 978-3-00-034073-4
Leopold, Steffen; Paetz, D.; Knöbber, F.; Polster, Tobias; Ambacher, Oliver; Sinzinger, Stefan; Hoffmann, Martin:
Tunable refractive beams steering using aluminum nitride thermal actuators
In: Proc. SPIE 7931, 79310B, 2011
Leopold, Steffen; Polster, Tobias; Geiling, Thomas; Hoffmann, Martin:
Erzeugung nadelförmiger Nanostrukturen aus Aluminiumnitrid (AlN) durch reaktives Plasmaätzen
In: 3. GMM-Workshop Mikro-Nano-Integration, März 2011
ISBN 9783800733347
Markweg, Eric; Nguyen, Tran Trung; Weinberger, Stefan; Ament, Christoph; Hoffmann, Martin:
Development of a miniaturized multisensory positioning device for laser dicing technology
In: Physics Procedia Volume 12, Part 2, 2011, pp. 387-395 Lasers in Manufacturing 2011 - Proceedings of the
Sixth International WLT Conference on Lasers in Manufacturing
Müller, Lutz; Kremin, Christoph; Hoffmann, Martin:
Mittels Nanostrukturierung optimierte Bimorph-Biegeaktoren großer Auslenkung
In: MikroSystemTechnik KONGRESS 2011, 10.-12. Oktober 2011 / Darmstadt, Proceedings. - VDE Verlag (Hrsg.), CD-ROM
ISBN 978-3-8007-3367-5
Pätz, Daniel; Leopold, Steffen; Sinzinger, Stefan; Hoffmann, M.; Knöbber, Fabian; Ambacher, Oliver:
Scannende Compound-Kamera zur hochauflösenden 3D-Objektabtastung
In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen
Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen / Jahrestagung.
Deutsche Gesellschaft für Angewandte Optik ; 112 (Ilmenau) : 2011.06.14-18. - Ilmenau, (2011), S. 102
Polster, Tobias; Leopold, Steffen; Hoffmann, Martin:
Untersuchungen zur Nanoporosität von AlN Membranen
In: 3. GMM-Workshop Mikro-Nano-Integration, März 2011, Stuttgart
ISBN 9783800733347
Polster, Tobias; Mehner, Hannes; Oeder, Andreas; Hoffmann Martin; Sinzinger, Stefan:
Optisch gepulste Mikroplasmaquelle für die Integration von Nanotomographie in eine Nanomessmaschine
In: MikroSystemTechnik KONGRESS 2011, 10.-12. Oktober 2011 / Darmstadt, Proceedings. - VDE Verlag (Hrsg.), CD-ROM
ISBN 978-3-8007-3367-5
Polster, Tobias; Leopold Steffen; Hoffmann, Martin:
Airborne particle generation for optical tweezers by thermo-mechanical membrane actuators
In: Proc. SPIE 8066, 80661F (2011)
Schneider, Mike; Hoffmann, Martin:
Non-electrical-power temperature-time integrating sensor for RFID based on microfluidics
In: Proc. SPIE 8066, 80661V (2011)
Weinberger, Stefan; Markweg, Eric; Nguyen, Tran Trung; Hoffmann, Martin; Ament, Christoph:
Positionserfassung von flexiblen Roboterarmen mit einem optischen Mikrotrackersystem
In: MikroSystemTechnik KONGRESS 2011, 10.-12. Oktober 2011 / Darmstadt, Proceedings. - VDE Verlag (Hrsg.), CD-ROM
ISBN 978-3-8007-3367-5
D. Salloch, U. Wieser, U. Kunze and T. Hackbarth:
Separation of the inertial-ballistic signal from hot-electron thermopower in an injection-type ballistic rectifier
In: "Physics of Semiconductors" (ICPS-30, Seoul, Korea 2010), ed. by J. Ihm and H. Cheong,
American Institute of Physics Conference Proceedings 1399, pp. 321-322 (2011).
DOI: 10.1063/1.3666383
2010
D. Salloch, U. Wieser, U. Kunze, T. Hackbarth:
Efficient injection-type ballistic rectification in Si/SiGe cross junctions
In: Physica E 42, 2618-2621 (2010).
DOI: 10.1016/j.physe.2010.03.021
M. Wiemann, U. Wieser, D. Reuter, A.D. Wieck, U. Kunze:
Full-wave rectification based upon hot-electron thermopower
In: Appl. Phys. Lett. 97, 062112 (2010).
DOI: 10.1063/1.3475922
S. Weingart, C. Bock, U. Kunze, K.V. Emtsev, Th. Seyller, L. Ley:
Influence of the growth conditions of epitaxial graphene on the film topography and the electron transport properties
In: Physica E 42, 687-690 (2010).
DOI: 10.1016/j.physe.2009.11.006
Bartsch de Torres, Heike; Rensch, C.; Fischer, Michael; Schober, Andreas; Hoffmann, Martin; Müller, Jens:
Thick film flow sensor for biological microsystem
In: Sensors and actuators / A. - Amsterdam [u.a.] : Elsevier Science. - Bd. 160.2010, 1/2, pp. 109-115
Dittrich, Lars; Mache, Thomas; Hoffmann, Martin:
Batch-taugliche Fertigungsansätze für feinwerktechnische Systemkomponenten
In: Thüringer Werkstofftag 2010, TU Ilmenau / Spieß, L.; Rädlein, E.; Schaaf, P. (Hrsg.
) ISBN 987-3-939473-74-9
Fischer, Michael; Bartsch, Heike; Pawlowski, Beate; Barth, S.; Hoffmann, Martin; Müller, Jens:
SiCer - ein innovativer Substratwerkstoff für MEMS
In: Thüringer Werkstofftag 2010. - Ilmenau : Univ.-Verl. Ilmenau. - 2010, p. 6
Fröber, Ulrike; Stubenrauch, Mike; Voges, Danja; Lehmann, Silvia V.; Hoffmann, Martin; Witte, Hartmut:
Miniaturisierte Evaluierungsumgebung für Zellen in 3-dimensionalen Scaffolds
5th Workshop „Microtechnology for Chemistry and Biology Laboratories“ , Elgersburg, Germany, February 2010
Goj, Boris; Dittrich, Lars; Erbe, Torsten; Rosenbaum, Sören; Koch, Ina; Drüe, Karl-Heinz; Ströhla, Tom; Hoffmann, Martin:
Radially magnetized permanent magnets for miniaturized low power magnetic valves
In: Conference Proceedings Actuator 2010, Bremen, Germany, 14-16 June, pp. 373-376
ISBN 978-3-933339-12-6
Goj, Boris; Dittrich, Lars; Erbe, Torsten; Rosenbaum, Sören; Hoffmann, Martin:
High precision test device for calibration of miniaturized three-dimensional magnetic sensors
In: Mechanika / International Conference Mechanika ; 15 (Kaunas) : 2010.04.08-09. - Kaunas : Technologija (2010), pp. 166-171
ISSN 1822-2951
Hoffmann, Martin:
Nanostrukturierte Materialien in Mikrosystemen: Silicium-Gras als Werkstoff
In: Thüringer Werkstofftag 2010. - Ilmenau : Univ.-Verl. Ilmenau. - 2010, pp. 27-32
Kremin, Christoph; Leopold, Steffen; Hoffmann, Martin:
Untersuchung zur selbst-organisierten Nanomaskierung in zyklischen Tiefenätzprozessen für die reproduzierbare
Erzeugung von nanostrukturiertem Silicium
2. GMM-Workshop Mikro-Nano-Integration, März 2010
ISBN 9783800732166
Laqua, D.; Just, T.; Hampl, Stefan; Cimalla, Volker; Bludau, O.; Husar, Peter; Hoffmann, Martin:
Konzeption eines implantierbaren RF-Transmitters mit autarker Energieversorgung zum intraokularen Druckmonitoring
In: Proceedings 44. DGBMT-Jahrestagung BMT 2010, Rostock, 5.-8. Oktober 2010 und
Biomedizinische Technik 55 (Suppl. 1), pp. 1-4, 2010
Leopold, Steffen; Polster, Tobias; Geiling, Thomas; Pätz, D.; Knöbber, F.; Albrecht, Arne; Ambacher, Oliver;
Sinzinger, Stefan; Hoffmann, Martin:
Structuring Techniques of Aluminum Nitride (AlN) Masks for Deep Reactive Ion Etching (DRIE) of Silicon
In: MME2010 Abstracts: 21st Micromechanics and Micro systems Europe Workshop. University of Twente,
Transducers Science and Technology, Enschede, The Netherlands, 2010
ISBN 978-9081673716
Leopold, Steffen; Polster, Tobias; Pätz, D.; Hoffmann, Martin:
Einsatz von nanokristallinem Aluminiumnitrid (AlN) in mikrosystemtechnischen Aktorkonzepten
2. GMM-Workshop Mikro-Nano-Integration, März 2010
ISBN 9783800732166
Mache, Thomas; Jakob, Christine; Dittrich, Lars; Hoffmann, Martin:
Batch-taugliche Fertigungsansätze für funktionenintegrierende feinwerktechnische Systemkomponenten mit
maßgeschneiderten Eigenschaften
In: Thüringer Werkstofftag 2010. - Ilmenau : Univ.-Verl. Ilmenau. - 2010, pp. 79-84
Pätz, D.; Leopold, Steffen; Knöbber, F.; Sinzinger, Stefan; Hoffmann, Martin; Ambacher, Oliver:
Tunable compound eye cameras
In: Proc. SPIE 7716, 77160K (2010)
Polster, Tobias; Hoffmann, Martin:
Aluminiumnitrid Dünnschicht-Nembranen - Nanokristalline Materialstruktur als Basis hoher mechanischer Stabilität
2. GMM-Workshop Mikro-Nano-Integration, März 2010
ISBN 9783800732166
Schilling, Cornelius; Fröber, Ulrike; Fischer, Robert; Stubenrauch, Mike; Hoffmann, Martin; Witte, Hartmut:
Werkstoffmix für BioMEMS - Interaktion von Bio-Mikrosystemen mit deren Werkstoffen
In: Thüringer Werkstofftag 2010, TU Ilmenau / Spieß, L.; Rädlein, E.; Schaaf, P. (Hrsg.)
ISBN 987-3-939473-74-9
Stubenrauch, Mike; Fröber Ulrike; Fischer, Robert; Voges, Danja; Schilling, Cornelius; Hoffmann, Martin; Witte, Hartmut:
Ansiedlung adhärenter Zellen in Bio-Mikrosystemen
5th Workshop „Microtechnology for Chemistry and Biology Laboratories“ , Elgersburg, Germany, February 2010
Stubenrauch, Mike; Schwandt, Morris; Kremin, Christoph; Hecht, Siegmar; Hoffmann, Martin:
Statische und dynamische Prüfung von Silizium-Nano-Klettverschlüssen
2. GMM-Workshop Mikro-Nano-Integration, März 2010
Weinberger, Stefan; Jakovlev, O.; Winkelmann, C. H.; Markweg, Eric; Hoffmann, Martin:
Development of a novel micromirror with high static rotation angle for measurement applications
In: Proceedings 21st Micromechanics and Microsystems Europe Workshop, September 2010, Enschede, Netherlands
2009
Fischer, Michael; Bartsch de Torres, Heike; Pawlowski, P.; Gade, Robert; Barth, S.; Mach, Matthias; Stubenrauch, Mike;
Hoffmann, Martin; Müller, Jens:
Silicon on ceramics - a new integration concept for silicon devices to LTCC
In: Journal of Microelectronics and Electronic Packaging (2009) 6, pp. 1-5
DOI: 10.4071/1551-4897-6.1.1
Perrone, Ruben; Bartsch de Torres, Heike; Hoffmann, Martin; Mach, Matthias; Müller, Jens:
Miniaturized embossed low resistance fine line coils in LTCC
In: Journal of microelectronics and electronic packaging, Bd. 6 (2009), 1, pp.42-48
DOI: 10.4071/1551-4897-6.1.42
Sánchez-Ferrer, Antoni; Fischl, Tamás; Stubenrauch, Mike; Wurmus, Helmut; Hoffmann, Martin; Finkelmann, Heino:
Photo-crosslinked side-chain liquid-crystalline elastomers for microsystems
In: Macromolecular Chemistry and Physics, Volume 210, Issue 20 pp. 1671-1677 (2009)
DOI: 10.1002/macp.200900308
Stubenrauch, Mike; Fröber, Ulrike; Voges, Danja; Schilling, Cornelius; Hoffmann, Martin; Witte, Hartmut:
A modular BIO-MEMS platform for new procedures and experiments in tissue engineering
In: Journal of Micromechanics and Microengineering 19, Juli 2009, 074013
DOI: 10.1088/0960-1317/19/7/074013
A.P. Milanov, T. Thiede, M. Hellwig, H. Parala, C. Bock, H.-W. Becker, D.K. Ngwashi, R.B.M. Cross, S. Paul, U. Kunze,
R.A. Fischer, A. Devi:
Rare-Earth Based Oxide and Nitride Thin Films Employing Volatile Homoleptic Guanidinate Precursors
In: ECS Transactions 25, 143-150 (2009).
DOI: 10.1149/1.3207585
S. Weingart, C. Bock, U. Kunze, F. Speck, Th. Seyller, L. Ley:
Low-temperature ballistic transport in nanoscale epitaxial graphene cross junctions
In: Appl. Phys. Lett. 95, 262101 (2009).
DOI: 10.1063/1.3276560
A.P. Milanov, T. Toader, H. Parala, D. Barreca, A. Gasparotto, C. Bock, H.-W. Becker, D.K. Ngwashi, R. Cross, S. Paul,
U. Kunze, R.A. Fischer, A. Devi:
Lanthanide Oxide Thin Films by Metalorganic Chemical Vapor Deposition Employing Volatile Guanidinate Precursors
In: Chemistry of Materials 21, 5443-5455 (2009).
DOI: 10.1021/cm902123m
D. Salloch, U. Wieser, U. Kunze, T. Hackbarth:
Thermopower-enhanced efficiency of Si/SiGe ballistic rectifiers
In: Appl. Phys. Lett. 94, 203503 (2009).
DOI: 10.1063/1.3140439
Dittrich, Lars; Mache, Thomas; Hoffmann, Martin:
Batch-taugliche Fertigungsansätze für feinwerktechnische Systemkomponenten
In: 9. Chemnitzer Fachtagung Mikromechanik & Mechatronik, Chemnitz, 5.-6. November 2009
ISBN 978-3-00-029135-7
Fröber, Ulrike; Stubenrauch, Mike; Weiß, Thomas; Berg, Albrecht; Voges, Danja; Schade, Ronald; Hildebrand, Gerhard;
Schnabelrauch, Matthias; Liefeith, Klaus; Hoffmann, Martin; Witte, Hartmut:
Microsystems for the characterization of 3D-ECM analogous bio-interfaces
In: IFMBE Proceedings Vol. 25/1 - World Congress on Medical Physics and Biomedical Engineering, September 7-12, 2009,
Munich, Germany / O. Dössel, W. C. Schlegel (Eds.). - Springer, pp. 94-97
ISSN 1680-0737; ISBN 978-3-642-03897-6, CD-ROM
Fröber, Ulrike; Stubenrauch, Mike; Voges, Danja; Schilling, Cornelius; Lehmann, Sylvia; Hoffmann, Martin; Witte, Hartmut:
Mikrosysteme für die Entwicklung von 3D-Biointerfaces auf Hydrogel-Basis
In: Tagungsband 5. Thüringer Grenz- und Oberflächentage und 7. Thüringer Biomaterial-Kolloquium 2009, 15./17. September 2009,
Friedrichroda, pp. 252-256
ISBN 978-3-00-028446-5
Fröber, Ulrike; Stubenrauch, Mike; Weiß, T.; Voges, Danja; Berg, A.; Schade R.; Hildebrand, G.; Schnabelrauch, M.; Liefeith, Klaus;
Hoffmann, Martin; Witte, Hartmut:
Integration of scaffolds into bio-microsystems for experiments in tissue engineering
In: Smart Systems Integration 2009, Brussels, Belgium, 10-11 March 2009 / T. Gessner. - AKA Verlag Heidelberg
ISBN 978-3-89838-616-6, CD-ROM
Hoffmann, Martin:
Anwendungen nanostrukturierter Grenzflächen in Mikrosystemen am Beispiel von Si-Gras und Herausforderungen
für die Forschung
In: MikroSystemTechnik KONGRESS 2009, 12.-14. Oktober 2009 / Berlin, Proceedings. - VDE Verlag (Hrsg.), CD-ROM
ISBN 978-3-8007-3183-1
Hoffmann, Martin; Wystup, Clemens:
Der Nanoklettverschluss als Verbindungselement in der Nanopositionier- und Nanomesstechnik
In: MikroSystemTechnik KONGRESS 2009, 12.-14. Oktober 2009 / Berlin, Proceedings. - VDE Verlag (Hrsg.), CD-ROM
ISBN 978-3-8007-3183-1
Kremin, Christoph; Leopold, Steffen; Stubenrauch, Mike; Hoffmann, Martin:
Variation von nanostrukturiertem Silicium aus DRIE-Tiefenätzprozessen zur Integration in Si-basierte MEMS
In: GMM-Fachbericht Mikro-Nano-Integration/Beiträge des 1. GMM-Workshops, Seeheim, 12.-13. März 2009. - VDE Verlag GmbH Berlin
ISSN 1432-3419; ISBN 978-3-8007-3155-8, CD-ROM
Kremin, Christoph; Leopold, Steffen; Hoffmann, Martin:
Investigation of self-organized nanomasking in cyclic deep silicon etching fort the reproducible generation of
nanostructured silicon
Conference: Nanotech Europe 2009, 28-30 September Berlin, Germany Type: talk/presentation
Mache, Thomas; Jakob, Christine; Dittrich, Lars; Hoffmann, Martin:
Herstellung von funktionsintegrierenden Galvanowerkstoffen mit maßgeschneiderten Eigenschaften für Mikrodirektantriebe
In: MikroSystemTechnik KONGRESS 2009, 12.-14. Oktober 2009 / Berlin, Proceedings. - VDE Verlag (Hrsg.), CD-ROM
ISBN 978-3-8007-3183-1
Polster, Tobias; Hoffmann, Martin:
Aluminum nitride based 3D, piezoelectric, tactile sensor
In: Procedia Chemistry 1 (2009) pp. 144-147
Stubenrauch, Mike; Fröber, Ulrike; Te Boekhorst, Lena; Voges, Danja; Hoffmann, Martin; Witte, Hartmut:
How to connect 23 tubes to a 4x4 mm² microchip?
In: Proceedings 20th Micromechanics Europe Workshop, 20-22 September 2009, Toulose, France
Stubenrauch, Mike; Schwandt, Morris; Hecht, Siegmar; Hoffmann, Martin:
Reliability aspects of mechanical interlocking bond interfaces with nanostructured silicon grass
In: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2009, Rome, 1-3 April 2009, pp. 167-169
ISBN 978-2-35500-009-6
Stubenrauch, Mike; Fröber, Ulrike; Fischer, Michael; Kremin, Christoph; Lilienthal, Katharina; Witte, Hartmut; Hoffmann, Martin:
Fertigungsinnovation: Kletten statt Kleben
In: Kongressdokumentation „Innovative Oberflächen: Mehrwert - Nachhaltigkeit – Funktionalität“, 3. MATERIALICA Surface Kongress,
14.Oktober 2009, München, CD-ROM
Stubenrauch, Mike; Fröber, Ulrike; Fischer, Michael; Kremin, Christoph; Witte, Hartmut; Hoffmann, Martin:
Klebe- und klemmfreies Anschlusskonzept für mikrofluidische Systeme mittels nanostrukturierter Oberflächen
In: GMM-Fachbericht Mikro-Nano-Integration/Beiträge des 1. GMM-Workshops, Seeheim, 12.-13. März 2009.
- VDE Verlag GmbH Berlin
ISSN 1432-3419; ISBN 978-3-8007-3155-8, CD-ROM
Stubenrauch, Mike; Schwandt, M.; Hecht, Siegmar; Kremin, Christoph; Fischer, Michael; Hoffmann, Martin:
Zuverlässigkeitsaspekte bei Nanoklettverschlüssen
In: GMM-Fachbericht Mikro-Nano-Integration/Beiträge des 1. GMM-Workshops, Seeheim, 12.-13. März 2009.
- VDE Verlag GmbH Berlin
ISSN 1432-3419; ISBN 978-3-8007-3155-8, CD-ROM
Weinberger, Stefan; Lukman, D.; Hoffmann, Martin:
Thermooptisch verstimmbare Bragg-Reflektoren aus neuartigen organisch-/ anorganischen Schichtsystemen
In: MikroSystemTechnik KONGRESS 2009, 12.-14. Oktober 2009 / Berlin, Proceedings. - VDE Verlag (Hrsg.), CD-ROM
ISBN 978-3-8007-3183-1
2008
Bartsch de Torres, Heike; Rensch, Christian; Thelemann, Torsten; Müller, Jens; Hoffmann, Martin:
Fully integrated bridge-type anemometer in LTCC-based microfluidic systems
In: Journal Advances in Science and Technology, Smart Materials & Micro/Nanosystem, Vol. 54, August 2008
DOI: 10.4028/www.scientific.net/AST.54.401
Bartsch de Torres, Heike; Gade, Robert; Albrecht, Arne; Hoffmann, Martin:
Systematic characterization of embossing processes for LTCC tapes
In: Journal of Microelectronics and Electronic Packaging (2008), 5, pp. 142-149 ISSN 1551-4897
DOI: 10.4071/1551-4897-5.4.142
Schumacher, Jens; Grodrian, Andreas; Kremin, Christoph; Hoffmann, Martin; Metze, Josef:
Hydrophobic coating of microfluidic chips structured by SU-8 polymer for segmented flow operation
In: Journal of Micromechanics and Microengineering 18 (2008) 055019, Mai 2008
DOI: 10.1088/0960-1317/18/5/055019
C. Bock, D.V. Pham, U. Kunze, D. Käfer, G. Witte, Ch. Wöll:
Influence of contact metals on the performance and morphology of pentacene bottom-contact field-effect transistors
In: Physica E 40, 2107-2109 (2008).
DOI: 10.1016/j.physe.2007.09.194
U. Wieser, M. Knop, U. Kunze, D. Reuter, A.D. Wieck:
Magneto-ballistic effects in non-centrosymmetric GaAs/AlGaAs cross junctions
In: Physica E 40, 2179-2181 (2008).
DOI: 10.1016/j.physe.2007.10.115
M. Wiemann, A. Cetinkaya, U. Wieser, U. Kunze, D. Reuter, A.D. Wieck:
Hot-electron bend resistance in a ballistic GaAs/AlGaAs cross junction
In: Physica E 40, 2128-2130 (2008).
DOI: 10.1016/j.physe.2007.10.025
Bartsch de Torres, Heike; Gade, Robert; Albrecht, Arne; Hoffmann, Martin:
Systematic characterisation of embossing processes for LTCC-tapes
In: Proceedings of the IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect
and Ceramic Microsystems
Technologies (CICMT 2008), April 21-24, 2008
Bartsch de Torres, Heike; Fischer, Michael; Gade, Robert; Mach, Matthias; Müller, Jens; Hoffmann, Martin;
Pawlowski, Beate; Barth, Stefan:
A new method for wafer level integration of silicon components on LTCC
In: Smart Systems Integration 2008, Barcelona, Spain, April 9-10, 2008 / T. Gessner (Editor). - VDE Verlag, pp. 392-394
ISBN 978-3-8007-3081-0
Dittrich, Lars; Kallenbach, Matthias; Hoffmann, Martin:
MiniMags – microtechnical challenges miniaturizing electro-magnetic valves
In: Smart Systems Integration 2008, Barcelona, Spain, April 9-10, 2008 / T. Gessner (Editor). - VDE Verlag, pp. 412-414
ISBN 978-3-8007-3081-0
Dittrich, Lars; Kallenbach, Matthias; Bonitz, Björn; Mache, Thomas; Hoffmann, Martin:
Heterogeneous actuator integration for miniaturized low-power magnetic valves
In: Conference Proceedings Actuator 2008, Bremen, Germany, 9-11 June 2008, pp. 145-148
ISBN-3-933339-10-3
Dittrich, Lars; Kallenbach, Matthias; Bonitz, Björn; Mache, Thomas; Hoffmann, Martin:
Batch-capable fabrication approach for a highly efficient miniaturized magnetic valve
In: Prospects in mechanical engineering / Internationales Wissenschaftliches Kolloquium. Technische Universität Ilmenau,
Faculty of Mechanical Engineering ; 53 (Ilmenau) : 08.-12.09.2008. - Ilmenau : Verl. ISLE, (2008), pp. 207-208
Fröber, Ulrike; Stubenrauch, Mike; Voges, Danja; Berg, A.; Hoffmann, Martin; Witte, Hartmut:
Bio-Microsystem for cell cultivation and manipulation and its peripherals
EMBEC 2008 - ESEM '08, Antwerp, Belgium, November 2008
Fröber, Ulrike; Stubenrauch, Mike; Voges, Danja; Schilling, Cornelius; Müller, Ralf; Witte, Hartmut; Hoffmann, Martin:
Biomikrosysteme zur Kultivierung von Indikatororganismen für Umwelt-Monitoring, Gefahrstoffdetektion und Zytodiagnostik
In: Tagungsband 4. Workshop "Chemische und biologische Mikrolabortechnik", 26.-28. Februar 2008, Ilmenau/Elgersburg
Fröber, Ulrike; Stubenrauch, Mike; Voges, Danja; Schilling, Cornelius; Bley, Kornelia; Koch, Manfred; Hoffmann, Martin; Witte, Hartmut:
Bio-MEMS for water analytics
In: Technische Universität Ilmenau : 53. Internationales Wissenschaftliches Kolloquium, 08. - 12.09.2008
Geiling, Thomas; Bartsch de Torres, Heike; Perrone, Ruben; Müller, Jens; Hoffmann, Martin:
Coil design for a low-loss inductive proximity sensor in LTCC
In: IBERSENSOR 2008, 6th Ibero-American Congress on Sensors, November 24th - 26th, 2008, Sao Paulo, Brazil
Hoffmann, Martin; Kallenbach, Matthias; Neumann, Karsten; Herrig, Martin; Zöppig, Veit; Dittrich, Lars:
Resonant ultra low-power valve with high nominal width
In: Conference Proceedings Actuator 2008, Bremen, Germany, 9-11 June 2008, pp. 1026-1029
ISBN-3-933339-10-3
Kallenbach, Matthias; Mühlke, Christian; Hoffmann, Martin:
Microsystems-engineering solutions for inductive components with high ampacity
In: Smart systems integration 2008 / European Conference & Exhibition on Integration Issues of Miniaturized Systems
- MEMS, MOEMS, ICs and Electronic Components ; 2 (Barcelona) : 09.-10.04.2008. - Berlin [u.a.] :
VDE-Verl., (2008), pp. 447-450
Keppler, Angela; Himmerlich, Marcel; Kremin, Christoph; Schumacher, Jens T.; Grodrian, Andreas; Schäfer, Jürgen A.;
Metze, Josef; Hoffmann, Martin; Krischok, Stefan:
Chemical modification and radiation induced degradation of the photoresist SU-8
In: Verhandlungen der Deutschen Physikalischen Gesellschaft. - Bad Honnef : DPG, Bd. 43 (2008), 1, CPP 10.3
Kremin, Christoph; Oeder, Andreas; Schumacher, Jens; Grodrian, Andreas; Metze, Josef; Sinzinger, Stefan; Hoffmann, Martin:
Integrierter mikrofluidischer Chips aus SU-8 zur elektrischen und optischen Manipulation biologischer Proben
14. Heiligenstädter Kolloquium, Heilbad Heiligenstadt, Deutschland, September 2008
Kremin, Christoph; Stubenrauch, Mike; Hoffmann, Martin:
Variations of nanostructured silicon in deep reactive ion etching processes
19th MicroMechanics Europe Workshop, Aachen, Germany, September 2008
Liefeith, Klaus; Schnabelrauch, Matthias; Jandt, Klaus; Witte, Hartmut; Hoffmann, Martin:
Functionalization of biointerfaces - Design and monitoring of ECM analogous biointerfaces for biomedical
and biophysical applications
Materials Science and Engineering, Nürnberg, Germany, September 2008
Oeder, Andreas; Amberg, Martin; Kremin, Christoph; Grodrian, Andreas; Hoffmann, Martin; Metze, Josef; Sinzinger, Stefan:
Optische Manipulation von Mikropartikeln in mikro-opto-fluidischen Systemen
In: DGaO-Proceedings. - Erlangen-Nürnberg: Dt. Ges. für angewandte Optik, Bd. 109 (2008), B27, insges. 2 S.
Perrone, Ruben; Bartsch de Torres, Heike; Hoffmann, Martin; Mach, Matthias; Müller, Jens:
Filling methods for embossed low resistance fine line coils in LTCC
In: Proceedings of the IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect and
Ceramic Microsystems Technologies (CICMT 2008), April 21-24, 2008
Polster, Tobias; Albrecht, Arne; Hoffmann, Martin:
Thin free standing AlN membranes – mechanical stable and flexible structural material for MEMS devices
19th MicroMechanics Europe Workshop, Aachen, Germany, September 2008
Polster, Tobias; Albrecht, Arne; Weinberger, Stefan; Hoffmann, Martin:
Aluminium nitride a smart multifunctional material for MEMS
In: Technische Universität Ilmenau : 53. Internationales Wissenschaftliches Kolloquium - Prospects in mechanical
engineering (2008), 08. - 12.09.2008, pp. 137 - 138
Stubenrauch, Mike; Fröber, Ulrike; Voges, Danja; Schilling, Cornelius; Witte, Hartmut; Hoffmann, Martin:
Bio-MEMS with integrated polymer scaffolds for tissue engineering
19th MicroMechanics Europe Workshop, Aachen, Germany, September 2008
Stubenrauch, Mike; Fröber, Ulrike; Voges Danja; Schilling Cornelius; Witte, Hartmut; Hoffmann Martin:
Bio-MEMS for new methods in tissue engineering
6th European Symposium on Biomedical Engineering, Chania, Greece June 08
Voges, Danja; Fröber, Ulrike; Stubenrauch, Mike; Schade, R.; Schilling, Cornelius; Witte, Hartmut; Hoffmann, Martin:
Konfigurierbare Bio-Mikrosysteme für die In-Vitro-Zellkultivierung
14. Heiligenstädter Kolloquium, Heilbad Heiligenstadt, September 2008
Witte, Hartmut; Hoffmann, Martin; Liefheith, Klaus; Schnabelrauch, Matthias; Jandt, Klaus:
ECM analogous biointerfaces for biomedical and biophysical applications
In: Technische Universität Ilmenau : 53. Internationales Wissenschaftliches Kolloquium, 08. - 12.09.2008
Wystup, Clemens; Stubenrauch, Mike; Hoffmann, Martin:
‘Black Silicon’ adjustment chips – a nanointerface for the conditioning of multifunctional AFM scanning tips
In: Technische Universität Ilmenau : 53. Internationales Wissenschaftliches Kolloquium - Prospects in mechanical
engineering (2008), 08. - 12.09.2008, pp. 209 - 210
2007
Cimalla, Volker; Stubenrauch, Mike; Weise, Frank; Fischer, Michael; Tonisch, Katja; Hoffmann, Martin; Ambacher, Oliver:
Suspended nanowire web
In: Applied Physics Letters 90 (2007), 101504, American Institute of Physics, 2007, p. 90ff
DOI: 10.1063/1.2711753
Gentemann, Roland B.; Teufer, Daniel; Temmen, Katrin; Hoffmann, Martin:
3D-fibre channels in silicon by electrical breakdown - New opportunities for optical fibre alignment and microfluidics
In: International Journal of Electronics and Communications (AEÜ), 61(2007)3, pp. 172-176 ISSN 1434-8411
DOI: 10.1016/j.aeue.2006.12.001
Stubenrauch, Mike; Fischer, Michael; Kremin, Christoph; Hoffmann, Martin; Müller, Jens:
Bonding of silicon with filled and unfilled polymers based on black silicon
In: Micro & Nano Letters, 2(2007)1, pp. 6-8
DOI: 10.1049/mnl:20065064
C. Bock, D.V. Pham, U. Kunze, D. Käfer, G. Witte, A. Terfort:
Influence of anthracene-2-thiol treatment on the device parameters of pentacene bottom-contact transistors
In: Appl. Phys. Lett. 91, 052110 (2007).
DOI: 10.1063/1.2767235
D.V. Pham, Y. Gravenstein, C. Bock, U. Kunze, D. Käfer, G. Witte, Ch. Wöll:
Reduced sheet resistance in pentacene field-effect transistors using thiol-modified electrodes
In: "Physics of Semiconductors" (ICPS-28, Wien, Austria 2006), ed. by W. Jantsch and F. Schäffler,
American Institute of Physics Conference Proceedings 893, 363-364 (2007).
E. Fritz, U. Wieser, U. Kunze, T. Hackbarth:
Ballistic rectification in four-terminal fork-shaped Si/SiGe junctions
In: "Physics of Semiconductors" (ICPS-28, Wien, Austria 2006), ed. by W. Jantsch and F. Schäffler,
American Institute of Physics Conference Proceedings 893, 717-718 (2007).
U. Wieser, M. Knop, P. Koop, U. Kunze, D. Reuter, A. D. Wieck:
Enhanced rectification efficiency in cascaded ballistic GaAs/AlGaAs rectifiers
In: "Physics of Semiconductors" (ICPS-28, Wien, Austria 2006), ed. by W. Jantsch and F. Schäffler,
American Institute of Physics Conference Proceedings 893, 719-720 (2007).
Albrecht, Arne; Fischl, Tamás; Stubenrauch, Mike; Król, József; Wurmus, Helmut; Hoffmann, Martin;
Sánchez-Ferrer, Antony; Chambers, Martin:
Integration of functional liquid crystalline elastomers in the microtechnics
In: Smart Systems Integration 2007, Paris, March 27-28, 2007 / T. Gessner (Editor). - VDE Verlag, pp. 403-406
ISBN 978-3-8007-3009-4
Albrecht, Arne; Polster, Tobias; Weinberger, Stefan; Hoffmann, Martin:
Dünne piezoelektrische AlN Monomorph-Membranen
In: 8. Chemnitzer Fachtagung Mikromechanik & Mechatronik, Chemnitz, 14.-15. November 2007, pp. 53-58
ISBN 978-3-00-022168-2
Bartsch de Torres, Heike:
Embossing of microfluidic structures in ceramic multilayers
In: Smart Systems Integration 2007, Paris, March 27-28, 2007 / T. Gessner (Editor). - VDE Verlag, pp. 423-425
ISBN 978-3-8007-3009-4
Bartsch de Torres, Heike; Fischer, Michael; Klett, Maren; Augspurger, Caroline; Schober, Andreas; Hoffmann, Martin:
Funktionskeramiken für biotechnologische Anwendungen
In: Tagungsband 3. Thüringer Grenz- und Oberflächentage und 6. Thüringer Biomaterial-Kolloquium 2007,
12./13. September 2007, Erfurt, pp. 333-334
ISBN 978-3-00-021859-0
Fischer, Michael; Bartsch de Torres, Heike; Stubenrauch, Mike; Müller, Jens; Hoffmann, Martin:
Bonding of LTCC and silicon substrates using adapted Black Silicon
Conference on Wafer Bonding for MEMS Technologies and Wafer Level Integration 2007, Halle/Saale (Germany),
9th-11th December 2007
Fischer, Michael; Stubenrauch, Mike; Hintz, Michael; Hoffmann, Martin; Müller, Jens:
Bonding of ceramic and silicon - new options and applications
In: Smart Systems Integration 2007, Paris, March 27-28, 2007 / T. Gessner (Editor). - VDE Verlag, pp. 477-479
ISBN 978-3-8007-3009-4
Hecht, Siegmar; Hoffmann, Martin:
Reliability of Black Silicon for MEMS packaging
1st World Congress Micro-Nano-Reliability, Berlin, Sept. 2-5, 2007, Micromaterials and Nanomaterials
ISSN 1669-2486, 6/2007
Hoffmann, Martin; Meier, Petra; Lang, Michael:
A compliant self-actuated device for minimally invasive surgery
In: Smart Systems Integration 2007, Paris, March 27-28, 2007 / T. Gessner (Editor). - VDE Verlag, pp. 557-559
ISBN 978-3-8007-3009-4
Kallenbach, Matthias; Bartsch de Torres, Heike; Hintz, Michael; Hoffmann, Martin:
High-inductive small-size microcoils with high ampacity
In: Smart Systems Integration 2007, Paris, March 27-28, 2007 / T. Gessner (Editor). - VDE Verlag, pp. 505-507
ISBN 978-3-8007-3009-4
Polster, Tobias; Albrecht, Arne; Hoffmann, Martin:
Aluminiumnitrid als piezoelektrisches Material für MEMS
In: MikroSystemTechnik KONGRESS 2007, 15.-17. Oktober, Dresden, Proceedings. - VDE Verlag, pp. 553-556
ISBN 978-3-8007-3061-2
Polster, Tobias; Hoffmann, Martin; Albrecht, Arne; Tonisch, Katja; Ambacher, Oliver; Stauden, Thomas;
Donahue, Mary; Michael, Steffen:
AlN as a piezoelectric material for integrated micro and nano sensors on silicon
In: Smart Systems Integration 2007, Paris, March 27-28, 2007 / T. Gessner (Editor). - VDE Verlag, pp. 249-255
ISBN 978-3-8007-3009-4
Stubenrauch, Mike; Fischer, Michael; Kremin, Christoph; Albrecht, Arne; Hoffmann, Martin:
Black Silicon as a smart structure for the bonding of polymers with silicon
In: Smart Systems Integration 2007, Paris, March 27-28, 2007 / T. Gessner (Editor). - VDE Verlag, pp. 161-166
ISBN 978-3-8007-3009-4
Stubenrauch, Mike; Fischer, Michael; Kremin, Christoph; Lilienthal, Katharina; Fröber, Ulrike; Voges, Danja;
Witte, Hartmut; Hoffmann, Martin:
´Black Silicon´ - einstellbare Nanostrukturen mit neuen Applikationsfeldern
In: Tagungsband 3. Thüringer Grenz- und Oberflächentage und 6. Thüringer Biomaterial-Kolloquium 2007,
12./13. September 2007, Erfurt, pp. 220-221
ISBN 978-3-00-021859-0
Tonisch, Katja; Weise, Frank; Stubenrauch, Mike; Cimalla, Volker; Ecke, Gernot; Will, Florentina; Romanus, Henry; Mrotzek,
Susanne; Hofmeister, Herbert; Hoffmann, Martin; Hülsenberg, Dagmar; Ambacher, Oliver:
Growth of silicon nanowires on UV-structurable glass using self-organized nucleation centres
In: Physica E: Low-dimensional Systems and Nanostructures, 38(2007)1-2, pp. 40-43 Proceedings of the E-MRS 2006
Symposium C: Silicon Nanocrystals for Electronic and Sensing Application
D.V. Pham, Y. Gravenstein, C. Bock, U. Kunze, D. Käfer, G. Witte, Ch. Wöll:
Reduced sheet resistance in pentacene field-effect transistors using thiol-modified electrodes
In: "Physics of Semiconductors" (ICPS-28, Wien, Austria 2006), ed. by W. Jantsch and F. Schäffler,
American Institute of Physics Conference Proceedings 893, 363-364 (2007).
E. Fritz, U. Wieser, U. Kunze, T. Hackbarth:
Ballistic rectification in four-terminal fork-shaped Si/SiGe junctions
In: "Physics of Semiconductors" (ICPS-28, Wien, Austria 2006), ed. by W. Jantsch and F. Schäffler,
American Institute of Physics Conference Proceedings 893, 717-718 (2007).
U. Wieser, M. Knop, P. Koop, U. Kunze, D. Reuter, A. D. Wieck:
Enhanced rectification efficiency in cascaded ballistic GaAs/AlGaAs rectifiers
In: "Physics of Semiconductors" (ICPS-28, Wien, Austria 2006), ed. by W. Jantsch and F. Schäffler,
American Institute of Physics Conference Proceedings 893, 719-720 (2007).
2006
C. Bock, D.V. Pham, U. Kunze, D. Käfer, G. Witte, Ch. Wöll:
Improved morphology and charge carrier injection in pentacene field-effect transistors with thiol-treated electrodes
In: J. Appl. Phys. 100, 114517 (7p.) (2006).
DOI: 10.1063/1.2400507
U. Wieser, M. Knop, M. Richter, U. Kunze, D. Reuter, A.D. Wieck:
Ballistic transport and rectification in mesoscopic GaAs/AlGaAs cross junctions
In: Phase Transitions 79, 755-764 (2006).
DOI: 10.1080/01411590600961321
S.A. Poenariu, U. Wieser, U. Kunze, T. Hackbarth:
Quantized conductance and bend resistance in an asymmetric Si/SiGe cross junction
In: Physica E 32, 539-42 (2006).
DOI: 10.1016/j.physe.2005.12.118
M. Knop, U. Wieser, U. Kunze, D. Reuter, A.D. Wieck:
Nonlocal versus local rectification in multiply connected electron waveguide structures
In: Physica E 32, 536-38 (2006).
DOI: 10.1016/j.physe.2005.12.117
M. Knop, U. Wieser, U. Kunze, D. Reuter, A.D. Wieck:
Ballistic rectification in an asymmetric mesoscopic cross junction
In: Appl. Phys. Lett. 88, 082110 (2006).
DOI: 10.1063/1.2179618
Fischer, Michael; Stubenrauch, Mike; Kups, Thomas; Romanus, Henry; Morales, F. M.; Ecke, Gernot;
Hoffmann, Martin; Knedlik, Christian; Ambacher, Oliver; Pezoldt, Jörg:
Self organization and properties of Black Silicon
In: Technische Universität Ilmenau : 51. Internationales Wissenschaftliches Kolloquium, 11. - 25.09.2006, S. 237
Tonisch, Katja; Cimalla, Volker; Will, Florentina; Weise, Frank; Stubenrauch, Mike; Albrecht, Arne;
Hoffmann, Martin; Ambacher, Oliver:
Nanowire-based electromechanical biomimetic sensor
E-MRS Spring Meeting 2006, May 29- June 3, 2006, Nizza
2005
U. Wieser, S. A. Poenariu, U. Kunze, T. Hackbarth:
Phonon induced breakdown of negative bend resistance in an asymmetric Si/SiGe cross junction
In: Appl. Phys. Lett. 87, 252114 (3 pages) (2005).
DOI: 10.1063/1.2150268
M. Knop, M. Richter, R. Maßmann, U. Wieser, U. Kunze, D. Reuter, C. Riedesel, A.D. Wieck:
Preparation of electron waveguide devices on GaAs/AlGaAs using negative-tone resist calixarene
In: Semicond. Sci. Technol. 20, 814-18 (2005).
DOI: 10.1088/0268-1242/20/8/031
2004
Dirk Nusse, Martin Hoffmann, Edgar Voges:
Megasonic enhanced KOH etching for silicon bulk micromachining
In: Proc. SPIE 5602, Optomechatronic Sensors, Actuators, and Control, (25 October 2004)
DOI: https://doi.org/10.1117/12.570220
K. H. Schmidt, C. Bock, M. Versen, U. Kunze, D. Reuter, A. D. Wieck:
Capacitance and tunneling spectroscopy of InAs quantum dots
In: J. Appl. Phys. 95, 5715-21 (2004).
DOI: 10.1063/1.1703827
2003
M. Hoffmann, D. Nüsse, E. Voges:
An electrostatically actuated 1x2 moving-fibre switch
In: IEEE Photonics Technology Letters, 15 (2003), 39-41
DOI: 10.1109/LPT.2002.805806
M. Hoffmann, P. Kopka, D. Nüsse, E. Voges:
Fibre-optical MEMS based on bulk silicon micromachining
In: Microsystem Technologies 9 (2003), 299-303
DOI: 10.1007/s00542-002-0237-z
C. Bock, K. H. Schmidt, U. Kunze, S. Malzer, G. H. Döhler:
Valence-band structure of self-assembled InAs quantum dots studued by capacitance spectroscopy
In: Appl. Phys. Lett. 82, 2071-3 (2003).
DOI: 10.1063/1.1564288
D. Reuter, P. Schafmeister, P. Kailuweit, C. Bock, U. Kunze, A. D. Wieck:
Electrical and optical characterization of InAs quantum dots grown on ion implanted GaAs(100)
In: physica status solidi (c) 0, 1109-12 (2003).
DOI: 10.1002/pssc.200303007
2002
M. Hoffmann, E. Voges:
Bulk silicon micromachining for MEMS in optical communication systems
In: Journal of Micromechanics and Microengineering 12 (2002), 349-360 (Übersichtsbeitrag)
DOI: 10.1088/0960-1317/12/4/301
K. H. Schmidt, C. Bock, U. Kunze, V. V. Khorenko, S. Malzer, G. H. Döhler, M. Versen, D. Reuter, A. D. Wieck:
Electronic structure of InAs self assembled quantum dots
In: Materials Science Engineering B 88, 238-42 (2002).
DOI: 10.1016/S0921-5107(01)00873-X
C. Bock, K. H. Schmidt, U. Kunze, V. V. Khorenko, S. Malzer, G. Döhler:
Electronic structure of self-assembled InAs quantum dots
In: Physica E 13, 208-11 (2002).
DOI: 10.1016/S1386-9477(01)00521-5
U. Wieser, U. Kunze, K. Ismail, J. O. Chu:
Fabrication of Si/SiGe quantum point contacts by electron-beam lithography and shallow wet-chemical etching
In: Physica E 13, 1047-50 (2002).
DOI: 10.1016/S1386-9477(02)00299-0
U. Wieser, U. Kunze, K. Ismail, J. O. Chu:
Quantum ballistic transport in an etch-defined Si/SiGe quantum point contact
In: Appl. Phys. Lett. 81, 1726-8 (2002).
DOI: 10.1063/1.1503157
C. Bock, C. Bronskowski, K. H. Schmidt, U. Kunze, S. Malzer, G. H. Döhler:
Capacitance spectroscopy of electron and hole energy levels in InAs self-assembled quantum dots
In: "Physics of Semiconductors" (ICPS-26, Edinburgh 2002), ed. by A. R. Long, J. H. Davies, Institute of Physics
Conference Series 171, P232 (2002).
C. Bock, C. Bronskowski, K. H. Schmidt, U. Kunze, S. Malzer, G. H. Döhler:
Capacitance spectroscopy of electron and hole energy levels in InAs self-assembled quantum dots
In: "Physics of Semiconductors" (ICPS-26, Edinburgh 2002), ed. by A. R. Long, J. H. Davies, Institute of Physics
Conference Series 171, P232 (2002).
2001
M. Hoffmann, D. Nüsse, E. Voges:
Electrostatic parallel-plate actuators with large deflections for use in optical moving-fibre switches
In: Journal of Micromechanics and Microengineering 11 (2001), 323-328
DOI: 10.1088/0960-1317/11/4/306
V.V. Aristov, M.V. Grigoriev, S.M. Kuznetsov, L.G. Shabelnikov, V.A. Yunkin, C. Rau, A. Snigirev, I. Snigireva,
T. Weitkamp, M. Hoffmann, E. Voges:
Silicon planar refractive lenses with the optimised design
In: Nuclear Instruments & Methods in Physics Research Section A – Acclerators, Spectrometers,
Detectors and Associated Equipment 470 (2001), 131-134
DOI: 10.1016/S0168-9002(01)01024-5
Snigireva, A. Snigirev, C. Rau, T. Weitkamp, V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, M. Hoffmann, E. Voges:
Holographic X-ray optical elements: transition between refraction and diffraction
In: Nuclear Instruments & Methods in Physics Research Section A – Acclerators, Spectrometers,
Detectors and Associated Equipment 467 (2001), 982-985
DOI: 10.1016/S0168-9002(01)00556-3
M. Hoffmann, E. Voges:
New silicon-based fibre assemblies for applications in integrated optics and optical MEMS
In: Applied Physics B Laser and Optics 76 (2001), 629-633
DOI: 10.1007/s003400100720
M. Versen, K. H. Schmidt, C. Bock, D. Reuter, A. D. Wieck, U. Kunze:
Single-electron tunneling through individual InAs quantum dots within a saddle point potential
In: phys. stat. sol.(b) 224, 669-73 (2001).
DOI: 10.1002/(SICI)1521-3951(200104)224:3<669::AID-PSSB669>3.0.CO;2-Q
V. V. Khorenko, S. Malzer, C. Bock, K. H. Schmidt, G. H. Döhler:
Electroluminscence of self-assembled InAs quantum dots in p-i-n diodes
In: phys. stat. sol. (b) 224, 129-32 (2001).
DOI: 10.1002/1521-3951(200103)224:1<129::AID-PSSB129>3.0.CO;2-S
2000
P. Kopka, M. Hoffmann, and E. Voges:
Coupled U-Shaped Cantilever Actuators for 1x4 and 2x2 Optical Fibre Switches
In: Journal of Micromechanics and Microengineering 10 (2000), 260-264
DOI: 10.1088/0960-1317/10/2/326
V.V. Aristov, M.V. Grigoriev, S.M. Kuznetsov, L.G. Shabelnikov, V.A. Yunkin, M. Hoffmann, E. Voges:
X-ray focusing by planar parabolic refractive lenses made of silicon
In: Optics Communications 177 (2000), 33-38
DOI: 10.1016/S0030-4018(00)00580-0
M. Hoffmann, S. Dickhut, E.Voges:
Fiber Ribbon Alignment Structures Based on Rhombus-Shaped Channels in Silicon
In: IEEE Photonics Technology Letters, 12 (2000), 828-830
DOI: 10.1109/68.853514
V.V. Aristov, M.V. Grigoriev, S.M. Kuznetsov, L.G. Shabelnikov, V.A. Yunkin, T. Weitkamp, C. Rau, I. Snigireva,
A. Snigirev, M. Hoffmann, E. Voges:
X-ray refractive planar lens with minimized absorption
In: Applied Physics Letters 77 (2000), 4058-4060
DOI: 10.1063/1.1332401
K. H. Schmidt, M. Versen, C. Bock, U. Kunze, D. Reuter, A. D. Wieck:
In-plane and perpendicular tunneling through InAs quantum dots
In: Physica E 7, 425-9 (2000).
DOI: 10.1016/S1386-9477(99)00354-9
K. H. Schmidt, M. Versen, C. Bock, D. Reuter, A. D. Wieck, U. Kunze:
Topographie und elektrische Eigenschaften von InAs-Quantenpunkten
In: Materialwiss. u. Werkstofftech. 31, 837-44 (2000).
DOI: 10.1002/1521-4052(200009)31:9<837::AID-MAWE837>3.0.CO;2-T
U. Wieser, D. Iamundo, U. Kunze, T. Hackbarth, U. König:
Nanoscale patterning of Si/SiGe heterostructures by electron-beam lithography and selective wet-chemical etching
In: Semicond. Sci. Technol. 15, 862-7 (2000).
DOI: 10.1088/0268-1242/15/8/313
1999
M. Hoffmann, P. Kopka, E. Voges:
All-silicon bistable micromechanical fiber switch based on advanced bulk micromachining
In: IEEE Journal of Selected Topics in Quantum Electronics 5 (1999), 46-51
DOI: 10.1109/2944.748104
M. Hoffmann, P. Kopka, E. Voges:
Optical fibre switches based on full wafer silicon micromachining
In: Journal of Micromechanics and Microengineering 9, (1999), 151-155
DOI: 10.1088/0960-1317/9/2/311
M. Hoffmann, P. Kopka, E. Voges:
Bistable Micromechanical Fiber-Optic Switches on Silicon with Thermal Actuators
In: Sensors & Actuators A78 (1999), Special Issue MEMS '98, 28-35
DOI: 10.1016/S0924-4247(99)00200-9
1998
M. Hoffmann, P. Kopka, E. Voges:
Thermo-optical digital switch arrays in silica-on-silicon with defined zero-voltage state
In: IEEE Journal of Lightwave Technology 16 (1998), 395-400
DOI: 10.1109/50.661366
M. Hoffmann, P. Kopka, T. Groß, E. Voges:
All-silicon bistable micromechanical fibre switches
In: IEE Electronics Letters 34, (1998), 207-208
DOI: 10.1049/el:19980145
U. Wieser, S. Skaberna, U. Kunze:
Self-adjusting formation of a lateral confinement potential in Si/SiGe heterostructures with compensating PN layers
In: Superlattices and Microstructures 23, 981-4 (1998).
DOI: 10.1006/spmi.1996.0347
1997
M. Hoffmann, P. Kopka, E. Voges:
Low-loss fiber-matched low-temperature PECVD waveguides with small core dimensions for optical communication
systems
In: IEEE Photonics Technology Letters 9 (1997), 1238-1240
DOI: 10.1109/68.618490
S. Skaberna, U. Wieser, U. Kunze:
Creation of a lateral potential modulation at the slope of an etched heterostructure with compensating PN layers
In: "Quantum Devices and Circuits", ed. by K. Ismail, S. Bandyopadhyay, J. P. Leburton (Imperial College Press,
London 1997), pp. 57-62 (1997).
DOI: 10.1142/9781783263479
1994
M. Hoffmann, H. Bezzaoui, E. Voges:
Micromechanical Cantilever Resonators with integrated optical interrogation
In: Sensors and Actuators A44, (1994), 71-75
DOI: 10.1016/0924-4247(94)00776-4
