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    Microsystems Technology
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    NEWS

    PRACTICE PROJECTS AND BACHELOR / MASTER THESIS

    Practical projects and Bachelor and Master theses can be started at any time if the requirements are met.

    There is the possibility of working on separate topics in research projects, ranging from the simulation and design of systems to their implementation in the clean room.

    The main questions concern innovative applications in current fields of microelectronics and microsystem technology, their simulation, design and manufacture, construction and programming of automated measuring stations as well as the characterization of components and systems. In accordance with the interdisciplinary nature of microsystem technology, the main topics of the work are just as suitable for engineering students (electrical engineering and mechanical engineering) as for those studying natural sciences, especially chemistry and physics.

    The necessary training is taken into account when setting the task, so that the work can be completed within the specified deadlines; Registration takes place as soon as work begins at the chair. A completion of the thesis within the semester is guaranteed if the start is timely.
    In the laboratory, support is usually provided by scientific staff, and Dr.-Ing. Claudia Bock, Dr.-Ing. Ulrich Wieser and Prof. Dr.-Ing. Martin Hoffmann available.


    Forschungsschwerpunkte und angebotene Bachelor-/Masterarbeiten:

    Erforschung flexibler pH Sensorsysteme auf Basis von 2D Materialien
    Ansprechpartner:  Dr.-Ing. Claudia Bock

    Bachelor-/Masterarbeit:
    - Herstellung und Charakterisierung MoS2 basierter ISFETs für die pH Messung
    Betreuerin:  Dr.-Ing. Claudia Bock


    Flexible Dünnfilmtransistoren auf Basis von 2D Materialien
    ALD Prozessentwicklung und die Integration derer in funktionale Bauelemente

    An­sprech­part­ner: Dr.-Ing. Claudia Bock, M. Sc. Leander Vogel

    Bachelor-/Masterarbeit:
    - Untersuchung von Vorbehandlungen für die 2D-Halbleiterherstellung in Atomlagenabscheidung (ALD) auf flexiblen Substraten
    - Annealing von zweidimensionalem Molybdändisulfid (MoS2)-Halbleiterschichten mittels Temperung in H2S-Gas
    - Herstellung und Charakterisierung von 2D-Materialbasierten Transistoren für moore’sche Skalierung
    - Erzeugung und Charakterisierung von ultradünnen Materialstapeln (<50nm) auf flexiblem Glas
    Betreuer:  M. Sc. Leander Vogel


    Passive Sensorik
    Oberflächenmikromechanik

    Ansprechpartner:  Dr.-Ing. Philip Schmitt

    Bachelorarbeit:
    - Aufbau eines Versuchsstands zur Charakterisierung von mikromechanischen Dehnungssensoren
    gewünschte Vorkenntnisse: LabView, Inventor (CAD)
    Masterarbeit: 
    - Entwicklung eines Versuchsstands zur automatisierten Eigenfrequenzanalyse von Mikrosystemen auf Waferlevel
    gewünschte Vorkenntnisse: LabView, Inventor (CAD)
    Betreuer:  Dr.-Ing. Philip Schmitt


    Mikroaktoren
    Ansprechpartner:  Dr.-Ing. Lisa Schmitt,  M. Sc. Marius Hillebrand

    Bachelor-/Masterarbeit:
    - Entwicklung isotroper Ätzprozesse zur Freistellung beweglicher Strukturen in Bulk-Silicium
    - Entwurf und Simulation von Federsystemen für Kipp-Schiebe-Mechanismen
    - Untersuchung mehrdirektionaler Mikroaktoren auf Basis asymmetrischer Felder
    Betreuer:  M. Sc. Marius Hillebrand


    Mikrosystemtechnik für THz-Anwendungen
    Ansprechpartner:  Dr.-Ing. Lisa Schmitt,  M. Sc. Marcel Burfeindt

    Bachelor-/Masterarbeit:
    - Fügeverfahren für THz Anwendungen
    - Schaltbare THz Systeme durch MEMS
    Betreuer:  M. Sc. Marcel Burfeindt

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    Ruhr-Universität Bochum
    Fakultät für Elektrotechnik und Informationstechnik
    Microsystems Technology
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    D-44801 Bochum

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    (+49)(0)234 / 32 - 22183
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