Research

The chair for microsystems technology is currently pursuing four focal points, which largely overlap, particularly in terms of the technology base. A dedicated clean room is available for this purpose, which was built in 2010 and fundamentally revised in 2017 - 2019 due to significant structural defects and upgraded for the processing of wafers up to 200 mm. In addition, devices in the center for interface-dominated high-performance materials are looked after and used, in particular the systems available there for plasma-based etching, and there is an active cooperation with the IMN MacroNano® and ZMN of the TU Ilmenau.

 

"IMAGINATION IS MORE IMPORTANT THAN KNOWLEDGE, BECAUSE KNOWLEDGE IS LIMITED. BUT IMAGINATION INCLUDES THE WHOLE WORLD."
ALBERT EINSTEIN



                                                                                                                                                                                        

Projects

Publications

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Cooperations




ForLab

 

In the project, an innovative, monolayer-precise deposition and etching technology at low temperatures for the production of cost-effective, flexible microelectronics and ultra-sensitive microsensors is being developed and implemented in a 200 mm cluster system on substrates.

 


 

 

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Equipment

The chair for microsystems technology has facilities for the preparation of semiconductor micro- and nanostructures. Another highlight at RUB is the clean room wing in the ID building, which was completed in 2020.

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Postal Address

Ruhr-University Bo­chum
Fa­culty of Electrical Engineering
and Information Technology
Microsystems Technology
Postbox ID 7
Uni­ver­si­täts­stra­ße 150
D-44801 Bo­chum

 

Contact

Administration 
Room: ID 05/441
Phone: (+49) (0) 234 32 - 22183 
Fax: (+49) (0) 234 32 - 14166    
Email: sekretariat-mst(at)​ruhr-uni-bochum.de        
La­ge­plan & An­rei­se­infor­ma­tio­nen der RUB                                                                            

 

Chair Holder

Prof. Dr.-Ing. Mar­tin Hoff­mann 
Room: ID 05/439 
Phone: (+49) (0) 234 32 - 27700
Fax: (+49) (0) 234 32 - 14166
Email: martin.​hoffmann-mst(at)​ruhr-uni-bochum.de
 

 

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