Plasma and optical Technologies (PluTO - Plasma und optische Technologien)
Process-suited plasma diagnostics on the basis of the multipol resonance probe (sub-project PLA 2)
Project manager: Prof. Dr. Ralf Peter Brinkmann
The sub-project PLA 2 of the PluTO collective deals with concepts for the industrial-suited diagnostics of technical, specially layer-depositing plasma processes. The main focus of the research is the innovative concept of the multipole resonance probe, MRP, which was planned as the optimal realisation of the general principle of the active plasma resonance spectroscopy during the groundwork. We aspire to gain comprehensive knowledge - both theoretical and experimental - of MRP and its interaction with the plasma. Parallely, innovative concepts for a digital measuring and evaluation electronics are to be researched. The overall system of probe and electronics is supposed to be realised as a demonstrator and metrologically characterised. The final goal is the definition of a validated, overall concept for fast, process-suited plasma diagnostics which can be used for controlling and regulating industrial plasma processes. On the one hand, this is supposed to strengthen the network "Plasma and Optical Technologies". On the other hand, it is als supposed to be the basis for following projects that develop marketable products for plasma diagnostics with a broader scope.
The sub-project essential for the overall network. A definitive improvement of the quality of plasma assisted deposited optical layers is only possible on the basis of closely monitoring or rather regulating the state of the plasma, meaning an adequate process-suited diagnostic. According to the groundwork, the concept of MRP seems to be ideal for this, since, due to its principle of function, it is nearly unaffected by the deposition of thin, especially als isolating layers. Alternative diagnostics with similarly advantageous characteristics are not known.
In case of success, the results of the sub-project PLA 2 will be immediately useful for the overall project PluTO. Apart from the optical technologies, the can also be used in other areas of plasma technology. The need for robust and process-suited plasma diagnostics ranges from micro- and nanotechnology to medical and bio engineering.
Modelling plasma assisted depositing processes
Sub-project PLM 1
Project manager: Prof. Dr. Ralf Peter Brinkmann
The sub-project PLM 1 deals with the plasma assisted depositing process "ion assisted deposition". A physically validated model is set up and used for realistic simulations. Especially concerning the calculation of the flows and energy distribution functions of all particles impinging the substrate depending on the outer process parameters working pressure, gas flows, evaporator settings etc.
To validate the model, the measuring data of PluTO partners will be used. The model will then be available for PluTO partners.
More about the project: http://www.pluto-projekt.de/.
