Pluto+ - Plasma and Optical Technologies: Increasing the Quality and Yield of Optical Coating Technologies

Plasmas find multiple applications in research and industry. They are used to coat or modify surfaces in the manufacture of microsystems, in semiconductor technology, for lab-on-chip production and in many other areas. An important aspect for the different manufacturing processes is the reproducibility of the process flow with desirable in-situ control. In the 'PluTO' project, which was also funded by the Federal Ministry of Education and Research, the multipole resonance probe for determining plasma density was developed. The aim of the BMBF follow-up project 'PluTO+' is to optimize the multipole resonance probe for everyday production and to further develop and miniaturize the measuring system.

Pro­ject­ duration: 2014 - 2018

Postal Address

Ruhr University Bochum
Faculty of Electrical Engineering and Information Technology
Microwave Systems
Postfach ID 28
Uni­ver­si­taets­stra­ße 150
D-44801 Bo­chum



Room: ID 04/337
Phone: (+49) (0) 234 32 - 29319 
Fax: (+49) (0) 234 32 - 14167   
E-Mail: silke.sauer[at]      
Map & Travel information  


Chair Holder

Prof. Dr.-Ing. Ilona Rolfes 
Room: ID 04/335 
Phone: (+49) (0) 234 32 - 27383
Fax: (+49) (0) 234 32 - 14167
E-Mail: ilona.rolfes[at]


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