The chair for microsystems technology is headed by Prof. Dr.-Ing. Martin Hoffmann and deals with all aspects of micro-electro-mechanical systems (MEMS), from the idea to production in the clean room. The main research areas are new concepts in 2D electronics, time-integral sensors, micro-actuators, micro-nano-integration and system integration for specific fields of application.
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Room: ID 05/441
Phone: (+49) (0) 234 32 - 22183
Fax: (+49) (0) 234 32 - 14166
Email: sekretariat-mst@rub.de
Lageplan & Anreiseinformationen der RUB
Chair Holder
Prof. Dr.-Ing. Martin Hoffmann
Room: ID 05/439
Phone: (+49) (0) 234 32 - 27700
Fax: (+49) (0) 234 32 - 14166
Email: martin.hoffmann-mst@rub.de
