Chair of Microsystem Technology

The chair for microsystem technology is headed by Prof. Dr.-Ing. Martin Hoffmann and deals with all aspects of micro-electro-mechanical systems (MEMS), from the idea to production in the clean room. The main research areas are new concepts in 2D electronics, time-integral sensors, micro-actuators, micro-nano-integration and system integration for specific fields of application.

 

 


Research

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Team

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Teaching

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Publications

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Postal Address

Ruhr-University Bo­chum
Fa­culty of Electrical Engineering
and Information Technology
Microsystem Technology
Postbox ID 7
Uni­ver­si­täts­stra­ße 150
D-44801 Bo­chum

 

Contact

Administration 
Room: ID 05/441
Phone: (+49) (0) 234 32 - 22183 
Fax: (+49) (0) 234 32 - 14166    
Email: sekretariat-mst@​rub.​de        
La­ge­plan & An­rei­se­infor­ma­tio­nen der RUB                                                                            

 

Chair Holder

Prof. Dr.-Ing. Mar­tin Hoff­mann 
Room: ID 05/439 
Phone: (+49) (0) 234 32 - 27700
Fax: (+49) (0) 234 32 - 14166
Email: martin.​hoffmann-mst@​rub.​de
 

 

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