BMBF-Project PT-GRID

Plasma-Technology-Grid

Self-consistent kinetic calculation of ion and neutral particle distribution function behind a plasma edge layer (sub-project 4)
Project manager: Prof. Dr. Ralf Peter Brinkmann

Currently, the modification of surfaces (e.g. by etching or separating) through technical plasmas is of great significance in various industries: the spectrum reaches from the semiconductor and photovoltaics industry to the automotive and textile industry as well as medical engineering. The physical and technological characteristics of the HF-plasma are substantially determined by the plasma edge layer. Although the layer only accounts for small part of the plasma volume, it controls the coupling of the electric energy - especially in capacitively coupled plasmas - and it is responsible for the impingement of high-energy particles (ions and neutrals) on the respective surface. 

To understand and advancement of a plasma process, it is important to have a method to calculate the energy and angle distribution of high-energy particles. On the one hand, the inner dynamic of the edge layer has to be known, on the other hand, one also has to know its respective operating status, which is determined by the plasma as a whole. 

More about the project: https://www.zib.de/projects/pt-grid-plasma-technology-grid.

Project partners: 
Fraun­ho­fer-In­sti­tut für Schicht- und Ober­flä­chentech­nik (IST) on­line: ist.​fraunhofer.​de

CFX Ber­lin Soft­ware GmbH on­line: cfx-ber­lin.​de

En­gi­nee­ring Sys­tem In­ter­na­tio­nal GmbH (ESI) on­line: esi-cfd.​com