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    Prof. Schulze zu Gast

    04/09/2015 Article TET

    Ko­ope­ra­ti­on mit West Vir­gi­nia Uni­ver­si­ty: Vom 23. Bis 27. März be­such­te Prof. Ju­li­an Schul­ze von der West Vir­gi­nia Uni­ver­si­ty, USA, den Lehr­stuhl.

    Im Fokus stan­den der wis­sen­schaft­li­che Aus­tausch mit den Lehr­stüh­len AEPT und TET sowie die Ar­beit mit Se­bas­ti­an Wil­czek, Dok­torand, am ge­mein­sa­men For­schungs­the­ma. Die For­schungs­ko­ope­ra­ti­on der bei­den Uni­ver­si­tä­ten im Be­reich Plas­ma­tech­nik wird in Zu­kunft wei­ter aus­ge­baut und ver­ste­tigt. Prof. Schul­ze stu­dier­te, pro­mo­vier­te und ha­bi­li­tier­te an der Ruhr-Uni­ver­si­tät Bo­chum. Als viel­ver­spre­chen­der Nach­wuchs­wis­sen­schaft­ler auf dem Feld der Nie­der­tem­pe­ra­tur-Plas­ma­phy­sik wurde er be­reits 2012 mit dem Hans-Wer­ner-Ost­hoff-Plas­ma­phy­sik-Preis aus­ge­zeich­net. Be­ein­dru­ckend waren der Um­fang und die her­aus­ra­gen­de Qua­li­tät sei­ner Ar­bei­ten, die in den we­ni­gen Jah­ren von Phy­sik­di­plom über Pro­mo­ti­on bis zur Ha­bi­litand am In­sti­tut für Ex­pe­ri­men­tal­phy­sik der RUB ent­stan­den sind. Seine Ex­pe­ri­men­te haben das Ver­ständ­nis der Phy­sik von Hoch­fre­quenz-Ent­la­dun­gen we­sent­lich er­wei­tert. Nach einer kur­zen Zeit als Post-Doc an der Hun­ga­ri­an Aca­de­my of Sci­en­ces ist er nun As­sis­tant Pro­fes­sor an der West Vir­gi­nia Uni­ver­si­ty und gilt als welt­weit an­er­kann­ter Ex­per­te auf dem Ge­biet der RF-Plas­men. Ge­mein­sam mit Se­bas­ti­an Wil­czek un­ter­sucht Prof. Schul­ze die Hei­zung/Dy­na­mik von Elek­tro­nen in ka­pa­zi­ti­ven Nie­der­dru­ck­ent­la­dun­gen. Die­ser Heiz­me­cha­nis­mus hat einen ent­schei­den­den Ein­fluss auf die Plas­ma­zu­sam­men­set­zung und muss ver­stan­den wer­den, um in­dus­tri­el­le Be­schich­tungs- und Ätz­pro­zes­se we­sent­lich bes­ser kon­trol­lie­ren zu kön­nen. Ba­sie­rend auf vor­he­ri­gen Zu­sam­men­ar­bei­ten wurde im März 2015 ein Ar­ti­kel über die Ein­schluss­gü­te von hoch­en­er­ge­ti­schen Bea­melek­tro­nen pu­bli­ziert. Die Ko­ope­ra­ti­on wird auch in Zu­kunft wei­ter­ge­führt. Im Som­mer­se­mes­ter bie­tet Prof. Schul­ze ein Blocks­e­mi­nar über fünf Tage für Stu­die­ren­de und In­ter­es­sier­te an. Mit sei­nem Be­such an der RUB wur­den wei­te­re in­ter­es­san­te The­men der Plas­ma­tech­nik dis­ku­tiert und un­ter­sucht. Ge­mein­sa­me Ver­öf­fent­li­chun­gen sind ge­plant.

    Wei­te­re In­for­ma­tio­nen zum Ar­ti­kel über die Ein­schluss­gü­te von hoch­en­er­ge­ti­schen Bea­melek­tro­nen: http://​iopscience.​iop.​org/​0963-0252/​24/​2/​024002/​

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