Our Projects
EXIST Transfer of Research by the Federal Ministry for Economic Affairs and Climate Action
Finished Projects at Ruhr-University Bochum
Finished Projects at TU Ilmenau
Finished…
The chair for microsystems technology has facilities for the preparation of semiconductor micro- and nanostructures
These include, among others:
Mask-Aligner, Heatpads, Oxidizing ovens,…
Publications
2025
Manfred Kohl, Christoph Ament, Gowtham Arivanandhan, Tamara Bechtold, Peter Conrad, Sipontina Croce, Vincent Gottwald, Martin Hoffmann et al.: Active bi- and multistability…
Energy self-sufficient microsensors
EVERYONE SAY: “IT CANNOT WORK!” - THEN SOMEONE CAME WHO DIDN'T KNOW THAT AND JUST MADE IT!
Energy self-sufficient systems have so far mostly been understood in…
TWO-DIMENSIONAL MATERIAL SYSTEMS FOR ELECTRONICS AND SENSORS
"Do not always take the mapped path It only leads you to where others have already walked." …
MICRO-NANO INTEGRATION
This topic forms one of the long-term, overarching focal points of our own research; since 2007 Prof. Dr.-Ing. Martin Hoffmann leads the technical committee 4.7…
