Dr.-Ing. Maria Grein
Technical assistant
Microsystem Technology
Address: Ruhr-University Bochum Faculty of Electrical Engineering and Informationtechnology …
Equipment
The chair for microsystems technology has facilities for the preparation of semiconductor micro- and nanostructures. Another highlight at RUB is the clean room wing in the ID building,…
Our Projects
EXIST Transfer of Research by the Federal Ministry for Economic Affairs and Climate Action
Finished Projects at Ruhr-University Bochum
Finished Projects at TU Ilmenau
Finished…
The chair for microsystems technology has facilities for the preparation of semiconductor micro- and nanostructures
These include, among others:
Mask-Aligner, Heatpads, Oxidizing ovens,…
Publications
2025
Malte J. M. J. Becher, Anton Saetchnikov, Leander Vogel, Ralf Nett, Yannis Laplace, Tingwen Guo, Pavel Varlamov, Charlie Massé, Claudia Bock, Andreas Ostendorf, Evgeny L.…
