The chair for microsystems technology has facilities for the preparation of semiconductor micro- and nanostructures
These include, among others:
Mask-Aligner, Heatpads, Oxidizing ovens,…
The „Forschungslabor Mikroelektronik Bochum“ - ForLab Bochum essentially includes the cleanroom of the Chair of Microsystems Technology at Faculty of Electrical Engineering and Information…
Examination period summer term 2024
All information about the examination period summer term 2024 are subject to change due to the current situation. Please take note of possible changes in the…