The chair for microsystems technology has facilities for the preparation of semiconductor micro- and nanostructures
These include, among others:
Mask-Aligner, Heatpads, Oxidizing ovens,…
The „Forschungslabor Mikroelektronik Bochum“ - ForLab Bochum essentially includes the cleanroom of the Chair of Microsystems Technology at Faculty of Electrical Engineering and Information…