The SFB-TR87 combines expertise in the fields of plasma physics/plasma technology, materials science/surface technology and interface chemistry. On this basis, ternary or quaternary ceramic layer systems on metal substrates with excellent tribological properties as well as silicon or carbon-containing oxide layers with outstanding barrier properties on plastic substrates are researched. For this purpose, the latest, partly self-developed source technology is used and characterized with a very broad, complementary spectrum of quantitative, partly newly developed plasma diagnostics and unique single particle beam experiments. The aim is to research the relationships between the material properties and the plasma parameters, to quantify them and use them for plasma control, layer development and in-situ layer control.
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