Plasmas find multiple applications in research and industry. They are used to coat or modify surfaces in the manufacture of microsystems, in semiconductor technology, for lab-on-chip production and in many other areas. An important aspect for the different manufacturing processes is the reproducibility of the process flow with desirable in-situ control. In the 'PluTO' project, which was also funded by the Federal Ministry of Education and Research, the multipole resonance probe for determining plasma density was developed. The aim of the BMBF follow-up project 'PluTO+' is to optimize the multipole resonance probe for everyday production and to further develop and miniaturize the measuring system.

Pro­ject­ duration: 2014 - 2018